The same way you can reverse engineer an engine used in airplanes, you can also reverse engineer an EUV machine
TLDR: Impossible
I don't think is impossible to reverse engineer an EUV machine but extremely difficult and i think even counterproductive, you see, this machines are not products but projects not very different from particle accelerators by example, all the effort is in the manufacturing process of the components rather than the components themselves, ASML learned while was making the machine, the tools, the software and so on. Having a EUV machine disassemble in front of you teach you nothing about those components, what process, tool tolerances and so on. SMEE can give the blueprints of their SSB-500 lithography machine and will still be difficult to manufacture one without knowing the manufacturing process of the components.
The Chinese are not new in EUV research, i think by the time the Chinese develop their EUV machine, i hope it will be soon, they will be rewarded not only with the machine but also with a whole ecosystem of supplier companies, engineers, technicians and knowledge.
A lot of research time could be wasted in reverse engineering because at the end of the day what is important is to master the manufacturing process of the components than the components themselves.