that is the cost to fabless companies. My guess for the software is the engineering time it costs to develop a design tool for the chip such as a driver and programming environment i.e. MBED for many ARM embedded chips.Looking at the chart, the biggest cost hike is the software?
Wafer went from $9.3k USD at 7 nm to $16.9k at 5 nm (82% increase in cost). I don't know how they arrived at the per chip cost, especially since they don't seem to claim different die size or yield. However, from my understanding orders are placed on a wafer start basis, so cost per wafer is what matters to the buyers.