Hi gelgoog,No need. Canon and Nikon (Japan) make DUV immersion lithography machine tools which would likely not be under sanctions.
Those basically do that SMEE's lithograph that's expected to come out next year will do. But there are more tools than just the lithograph you need chip verification tools and bunch of other tools. Some of them are produced by Tokyo Electron but others might only be available or might only have top performance if they come from an US tool vendor. This is a production pipeline. You need loads of machine tools.
The problem is the EUV lithography tools and other things in the component chain and consumables like mask materials and other chemical products which China doesn't manufacture either. You would expect China, for example, to at least have a huge monocrystalline silicon production industry for all the wafers it uses for solar cells but AFAIK it doesn't and this is incredible. There is an industry for cutting the silicon ingots and recently a large capacity for polycrystalline silicon has been built in China. Polycrystaline silicon is used in cheap solar cells but can't be used for chips. You need monocrystaline silicon that's used in higher end solar cells. It's as simple as that. I won't even get into details of all the other chemicals involved in the chip production process which also aren't produced in China because frankly it's above me.
Thanks for your prompt reply, The reason I ask that question, if SMEE had able to develop all the equipment necessary for local production of advance chip and China decided to apply an import substitute and ban import, will that force TSMC and Samsung to produce in China using sanction proof equipment (SMEE). The Dual Circulation economic plan and the 5 year tech investment really jive with made in China theme, the only problem is the FAB sector, It cant produce enough chips domestically.
In my opinion, the US will continue the tech war whoever win the presidency, The Chinese govt know that and is waiting for SMEE to finish its 28nm DUV and EUVL development. Remember China had'nt retaliated yet, they know their weakness, but in Biden the whole US establishment is on board full time unlike under Trump and they (Democrats) are internationalist and are more effective in persuading its allies for a collective action.