Yes.....i came across article as well.@WTAN
Looks like Shanghai LPP unlikely cymer and gipgaphonton which use gas laser to
Vaporize the tinc source. The Shanghai institute uses fiber laser
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The project to be purchased is the pump source and its drive control system of the key technology research project of LPP-EUV lithography light source undertaken by me, which is mainly used for the assessment and screening of optical fiber materials and high-power components and program verification. In order to simulate the pumping state of the initial sample of the project design plan, and more realistically evaluate the fiber materials, high-power passive components and optical components used in the initial and correct samples of the project, screening and aging evaluation, it is necessary to customize the pump that matches the brightness of the project design It is equipped with a more flexible and diverse drive power supply with control functions to meet the needs of different evaluation applications.
The procurement project includes two sets of 6kW pump sources and their drive control cabinets, two sets of 480W pump sources and their drive control units, and two sets of 900W×6 cabinet-type drive control systems. The pump module adopts the 3×1 pump beam combination scheme, and finally realizes the output power of a single pump module is greater than 480W. Due to the urgent development schedule of the project, it is necessary to complete the delivery of the purchased products within one month. Shanghai Feibo Laser Technology Co., Ltd. (hereinafter referred to as Feibo Company) is a professional manufacturer of high-power fiber laser products, with rich engineering experience in the design and development of high-power fiber lasers. In the early stage, Fibo Company participated in the design and demonstration of the departmental component scheme on similar projects, and undertook the corresponding outsourcing development. Therefore, it has a clear understanding of the index requirements and functional requirements of such high-power products, and can provide products that meet the technical requirements on time , And timely after-sales maintenance. Due to the short procurement cycle, strict index requirements, and various control functions, in order to ensure the rapid and reliable development of scientific research and ensure the smooth progress of the project, it is proposed to apply for this procurement task to be undertaken by Shanghai Feibo Laser Technology Co., Ltd., and the procurement method is determined to be single source
They are doing something different and using Fibre Laser instead of the C02 Laser made by Trumpf.
Hope they succeed using this type of Laser.
Maybe this will be a indigenous way which will not cause IP Issues with Trumpf and Cymer.
Looks like the Shanghai Inst of Optics is ramping up their development of the LPP EUV Light Source.
This also pretty much confirms that the SMEE EUVL will be using a LPP Light Source.