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Chinese semiconductor industry
- Thread starter Hendrik_2000
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@WTAN
Looks like Shanghai LPP unlikely cymer and gipgaphonton which use gas laser to
Vaporize the tinc source. The Shanghai institute uses fiber laser
________________________________________
The project to be purchased is the pump source and its drive control system of the key technology research project of LPP-EUV lithography light source undertaken by me, which is mainly used for the assessment and screening of optical fiber materials and high-power components and program verification. In order to simulate the pumping state of the initial sample of the project design plan, and more realistically evaluate the fiber materials, high-power passive components and optical components used in the initial and correct samples of the project, screening and aging evaluation, it is necessary to customize the pump that matches the brightness of the project design It is equipped with a more flexible and diverse drive power supply with control functions to meet the needs of different evaluation applications.
The procurement project includes two sets of 6kW pump sources and their drive control cabinets, two sets of 480W pump sources and their drive control units, and two sets of 900W×6 cabinet-type drive control systems. The pump module adopts the 3×1 pump beam combination scheme, and finally realizes the output power of a single pump module is greater than 480W. Due to the urgent development schedule of the project, it is necessary to complete the delivery of the purchased products within one month. Shanghai Feibo Laser Technology Co., Ltd. (hereinafter referred to as Feibo Company) is a professional manufacturer of high-power fiber laser products, with rich engineering experience in the design and development of high-power fiber lasers. In the early stage, Fibo Company participated in the design and demonstration of the departmental component scheme on similar projects, and undertook the corresponding outsourcing development. Therefore, it has a clear understanding of the index requirements and functional requirements of such high-power products, and can provide products that meet the technical requirements on time , And timely after-sales maintenance. Due to the short procurement cycle, strict index requirements, and various control functions, in order to ensure the rapid and reliable development of scientific research and ensure the smooth progress of the project, it is proposed to apply for this procurement task to be undertaken by Shanghai Feibo Laser Technology Co., Ltd., and the procurement method is determined to be single source
Looks like Shanghai LPP unlikely cymer and gipgaphonton which use gas laser to
Vaporize the tinc source. The Shanghai institute uses fiber laser
________________________________________
The project to be purchased is the pump source and its drive control system of the key technology research project of LPP-EUV lithography light source undertaken by me, which is mainly used for the assessment and screening of optical fiber materials and high-power components and program verification. In order to simulate the pumping state of the initial sample of the project design plan, and more realistically evaluate the fiber materials, high-power passive components and optical components used in the initial and correct samples of the project, screening and aging evaluation, it is necessary to customize the pump that matches the brightness of the project design It is equipped with a more flexible and diverse drive power supply with control functions to meet the needs of different evaluation applications.
The procurement project includes two sets of 6kW pump sources and their drive control cabinets, two sets of 480W pump sources and their drive control units, and two sets of 900W×6 cabinet-type drive control systems. The pump module adopts the 3×1 pump beam combination scheme, and finally realizes the output power of a single pump module is greater than 480W. Due to the urgent development schedule of the project, it is necessary to complete the delivery of the purchased products within one month. Shanghai Feibo Laser Technology Co., Ltd. (hereinafter referred to as Feibo Company) is a professional manufacturer of high-power fiber laser products, with rich engineering experience in the design and development of high-power fiber lasers. In the early stage, Fibo Company participated in the design and demonstration of the departmental component scheme on similar projects, and undertook the corresponding outsourcing development. Therefore, it has a clear understanding of the index requirements and functional requirements of such high-power products, and can provide products that meet the technical requirements on time , And timely after-sales maintenance. Due to the short procurement cycle, strict index requirements, and various control functions, in order to ensure the rapid and reliable development of scientific research and ensure the smooth progress of the project, it is proposed to apply for this procurement task to be undertaken by Shanghai Feibo Laser Technology Co., Ltd., and the procurement method is determined to be single source
Do you read Chinese?Could you link to the original newsitem? Thanks
Award winning product, similar to KLA Tencor surface defect detection.
Award-winning project: SPRUCE series non-patterned wafer surface defect optical inspection equipment Winner: Shenzhen Zhongke Feike Technology Co., Ltd. Reasons for winning: With the strong support of major national science and technology projects, after years of unremitting efforts, the research and development team of FTC has successfully independently developed the SPRUCE series of optical inspection equipment for surface defects of non-patterned wafers applied to the 90-28nm node. At present, the sales volume of products has exceeded 50 sets, and the customer base covers dozens of major domestic semiconductor manufacturers, and they have been successfully sold to Taiwan, China. The success of the SPRUCE series of products has broken the long-term monopoly of foreign suppliers in one fell swoop, realized the localization and industrialization of this type of equipment, and will surely help the rise and take-off of the domestic semiconductor manufacturing industry and testing equipment.
2)Award-winning project: R&D and application of key technology of electronic grade hydrofluoric acid for advanced process of 12-inch integrated circuit
Electronic-grade hydrofluoric acid is one of the key basic materials for integrated circuit manufacturing. Before the implementation of the project, the products were basically dependent on imports. Through the technical research of the Zhongjuxin project team, it has broken through the key technical bottlenecks of electronic grade hydrofluoric acid production, purification, testing, packaging, and secondary pollution prevention. The main performance and technical indicators of the product exceed the requirements of the international SEMI standard G5 and meet the foreign similar products Advanced level, has been stably applied to the domestic advanced 12-inch wafer, 28-nanometer wire process, and 1x nano-line width DRAM process. The products have covered more than 70% of domestic integrated circuit manufacturing customers, ensuring my country's ultra-large-scale integrated circuit and other fields Sustainable development
3)Award-winning project: R&D and industrialization of high-purity hexafluoroethane Winner: Guangdong Huate Gas Co., Ltd. Reasons for winning: The use of high-efficiency secondary distillation technology and the combination of energy-saving low-temperature adsorption and pressure adsorption technology, and the use of special adsorbents, achieve the purity of hexafluoroethane products above 5N3. The third-party testing agency has tested the actual measurement result to reach 5N8. Achievement patents won the China Patent Award Excellence Award, leading the formulation of national standards, and won the 10th China Semiconductor Innovative Products and Technologies, Guangdong Famous Brand Products and many other honors. Hexafluoroethane has been mass-produced and has been supplied to many well-known companies such as SMIC, China Resources Shanghua, Huahong Grace, TSMC, etc. The current domestic market share is more than 60%, which has greatly promoted the localization of hexafluoroethane. process.
4)Award-winning project: Demonstration of application of complete sets of domestic equipment and materials for 8-inch line Winner: Beijing Yandong Microelectronics Co., Ltd. Reasons for winning: Beijing Yandong Company’s "8-inch line complete set of domestic equipment and material application demonstration" project took the 8-inch line construction and operation as an opportunity to purchase key domestic equipment supported by major national science and technology projects, and cooperated with domestic research institutions and equipment suppliers to create innovations. Difficult, not only completed the process development verification of ion implantation, etching, cleaning, metal sputtering, diffusion, thin film and other equipment, promoted the continuous improvement of equipment performance and efficiency, but also solved the joint debugging of complete sets of domestic equipment to achieve process penetration and batch The production problem has greatly promoted the industrial application and promotion of domestic equipment, and has a demonstrative effect in establishing independent and controllable integrated circuit domestic production lines. At the same time, in terms of material application, the domestic supply of most materials has also been realized.
Award-winning project: SPRUCE series non-patterned wafer surface defect optical inspection equipment Winner: Shenzhen Zhongke Feike Technology Co., Ltd. Reasons for winning: With the strong support of major national science and technology projects, after years of unremitting efforts, the research and development team of FTC has successfully independently developed the SPRUCE series of optical inspection equipment for surface defects of non-patterned wafers applied to the 90-28nm node. At present, the sales volume of products has exceeded 50 sets, and the customer base covers dozens of major domestic semiconductor manufacturers, and they have been successfully sold to Taiwan, China. The success of the SPRUCE series of products has broken the long-term monopoly of foreign suppliers in one fell swoop, realized the localization and industrialization of this type of equipment, and will surely help the rise and take-off of the domestic semiconductor manufacturing industry and testing equipment.
2)Award-winning project: R&D and application of key technology of electronic grade hydrofluoric acid for advanced process of 12-inch integrated circuit
Electronic-grade hydrofluoric acid is one of the key basic materials for integrated circuit manufacturing. Before the implementation of the project, the products were basically dependent on imports. Through the technical research of the Zhongjuxin project team, it has broken through the key technical bottlenecks of electronic grade hydrofluoric acid production, purification, testing, packaging, and secondary pollution prevention. The main performance and technical indicators of the product exceed the requirements of the international SEMI standard G5 and meet the foreign similar products Advanced level, has been stably applied to the domestic advanced 12-inch wafer, 28-nanometer wire process, and 1x nano-line width DRAM process. The products have covered more than 70% of domestic integrated circuit manufacturing customers, ensuring my country's ultra-large-scale integrated circuit and other fields Sustainable development
3)Award-winning project: R&D and industrialization of high-purity hexafluoroethane Winner: Guangdong Huate Gas Co., Ltd. Reasons for winning: The use of high-efficiency secondary distillation technology and the combination of energy-saving low-temperature adsorption and pressure adsorption technology, and the use of special adsorbents, achieve the purity of hexafluoroethane products above 5N3. The third-party testing agency has tested the actual measurement result to reach 5N8. Achievement patents won the China Patent Award Excellence Award, leading the formulation of national standards, and won the 10th China Semiconductor Innovative Products and Technologies, Guangdong Famous Brand Products and many other honors. Hexafluoroethane has been mass-produced and has been supplied to many well-known companies such as SMIC, China Resources Shanghua, Huahong Grace, TSMC, etc. The current domestic market share is more than 60%, which has greatly promoted the localization of hexafluoroethane. process.
4)Award-winning project: Demonstration of application of complete sets of domestic equipment and materials for 8-inch line Winner: Beijing Yandong Microelectronics Co., Ltd. Reasons for winning: Beijing Yandong Company’s "8-inch line complete set of domestic equipment and material application demonstration" project took the 8-inch line construction and operation as an opportunity to purchase key domestic equipment supported by major national science and technology projects, and cooperated with domestic research institutions and equipment suppliers to create innovations. Difficult, not only completed the process development verification of ion implantation, etching, cleaning, metal sputtering, diffusion, thin film and other equipment, promoted the continuous improvement of equipment performance and efficiency, but also solved the joint debugging of complete sets of domestic equipment to achieve process penetration and batch The production problem has greatly promoted the industrial application and promotion of domestic equipment, and has a demonstrative effect in establishing independent and controllable integrated circuit domestic production lines. At the same time, in terms of material application, the domestic supply of most materials has also been realized.
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D
Deleted member 15949
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YesDo you read Chinese?
@WTAN
The current smee 28nm DUV is based on water immersion and 197nm ArF laser.
But Japan has 157nm ArF laser , what if China goes that route and have 157nm ArF laser but with immersion, now would that DUV possible to do 5nm??
157nm is not ArF laser. It is F2 laser. F2 (157nm) was considered to be used as a replacement for ArF (197nm) at one point. But then ArF immersion lithography was invented and commercialized. It was much cheaper to develop than F2. Water immersion allowed the exposure of finer details than what you could get just with lenses. So eventually F2 got cancelled and future technology efforts by the industry were focused on EUV (13.5nm). IIRC the problem they had with F2 is they could not develop lenses for it that worked properly for a long time. Then they had problems with the mask pellicles lasting long enough. I think these got solved eventually but by the time they did, immersion ArF lithography could already produce at the details you could with dry F2. Immersion ArF required no substantially new laser or lens technology.
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antiterror13
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@WTAN
The current smee 28nm DUV is based on water immersion and 197nm ArF laser.
But Japan has 157nm ArF laser , what if China goes that route and have 157nm ArF laser but with immersion, now would that DUV possible to do 5nm??
Is it true that ASML DUV is based on 193-nm ArF ?
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