ASML stopped at 193nm. Canon developed the 157nm maybe it's too diificult.Is it true that ASML DUV is based on 193-nm ArF ?
ASML stopped at 193nm. Canon developed the 157nm maybe it's too diificult.Is it true that ASML DUV is based on 193-nm ArF ?
yesIs it true that ASML DUV is based on 193-nm ArF ?
Is it possible to use immersion with F2 laser? That should still be an improvement over immersion ArF, right?157nm is not ArF laser. It is F2 laser. F2 (157nm) was considered to be used as a replacement for ArF (197nm) at one point. But then ArF immersion lithography was invented and commercialized. It was much cheaper to develop than F2. Water immersion allowed the exposure of finer details than what you could get just with lenses. So eventually F2 got cancelled and future technology efforts by the industry were focused on EUV (13.5nm). IIRC the problem they had with F2 is they could not develop lenses for it that worked properly for a long time. Then they had problems with the mask pellicles lasting long enough. I think these got solved eventually but by the time they did, immersion ArF lithography could already produce at the details you could with dry F2. Immersion ArF required no substantially new laser or lens technology.
Well, no. At least not with water. Water is an insanely good absorber of UV below 200 nm wavelength. Water's absorption coefficient for 157 nm light is more than a million times greater compared to its absorption coefficient for 193 nm. 157 nm is also absorbed by air too so it needs vacuum and purge mechanisms just like EUV.Is it possible to use immersion with F2 laser? That should still be an improvement over immersion ArF, right?
@Oldschool I don't get it , if they are concern, why build one in Arizona? maybe they didn't expect that Intel will be building a new FABS beside them? or the American just outright lie about their intention? well all I can say is stupid is as stupid does.Good, TSMC worrying US and EU fab expansion would create overcapacity and one can make little money. Put squeeze on everyone in western market . That would the start of decline of TSMC and Samsung. That would be ideal.
TSMC doesn't think from others perspective. Others do it for security. Can't expect everyone put all their eggs into TSMC
China should forbids Chinese companies from using TSMC at 28nm and above.
they are being forced or pressured by US government to build the fab and share the know how. They are just puppets.@Oldschool I don't get it , if they are concern, why build one in Arizona? maybe they didn't expect that Intel will be building a new FABS beside them? or the American just outright lie about their intention? well all I can say is stupid is as stupid does.
@Oldschool I don't begrudge them, It forces China to innovate and become self sufficient. The American is in for instant gratification either thru monetary if not thru force or threat, that in the long term may have disastrous effect on their competitiveness.they are being forced or pressured by US government to build the fab and share the know how. They are just puppets.
They are much more stingy toward mainland But they can't say No to US.
It is to be seen how "instant" the gratification is.@Oldschool I don't begrudge them, It forces China to innovate and become self sufficient. The American is in for instant gratification either thru monetary if not thru force or threat, that in the long term may have disastrous effect on their competitiveness.
The sooner TSMC failed the better. Their engineers can work at mainland like liang@Oldschool I don't begrudge them, It forces China to innovate and become self sufficient. The American is in for instant gratification either thru monetary if not thru force or threat, that in the long term may have disastrous effect on their competitiveness.