Northern Huachuang's patent for "RF devices and semiconductor equipment" was authorized
Beijing North Huachuang Microelectronics Equipment Co., Ltd.'s "RF device and semiconductor equipment" patent has been authorized. The authorization announcement date is November 14, and the authorization announcement number is CN112397362B.
The patent abstract shows that the present invention discloses a radio frequency device and semiconductor equipment. The radio frequency device is applied to semiconductor equipment. The radio frequency device includes a radio frequency coil and a driver. The radio frequency coil includes a flexible connector and a plurality of sub-coil segments. The flexible The connecting member is made of conductive material, and the adjacent sub-coil segments are connected to the radio frequency coil through the flexible connecting member. The radio frequency coil is used to electrically connect with the radio frequency power supply; at least one of the plurality of sub-coil segments is One is connected to the driving member, and the driving member is used to drive the corresponding connected sub-coil segment to rise and fall.
It is reported that the above technical solution can solve the problem of uneven plasma distribution in the current reaction chamber, resulting in poor etching uniformity of the wafer.
