The Ministry of Industry and Information Technology publicly solicits opinions on industry standards such as dry etching equipment testing methods
According to the website of the Ministry of Industry and Information Technology on November 16, the Ministry of Industry and Information Technology has publicly solicited opinions on 196 industry standards including the "Dry Etching Equipment Test Method for Semiconductor Equipment Integrated Circuit Manufacturing", 1 foreign language version of an industry standard, and 38 recommended national standard plan projects. .
According to the overall arrangement of standardization work, the Ministry of Industry and Information Technology will now apply for 196 industry standards such as "Test Methods for Dry Etching Equipment for Semiconductor Equipment Integrated Circuit Manufacturing", 1 industry standard foreign language version project such as "Snow Lotus Care Sticker" and " Environmental 38 recommended national standard plan projects including "Pollution Prevention and Control Equipment Terminology" will be announced with a deadline of December 16, 2023.
Among them, regarding the "Test Methods for Dry Etching Equipment for Semiconductor Equipment Integrated Circuit Manufacturing", the main drafting units include the 48th Research Institute of China Electronics Technology Group Corporation , China Electronics Technology Standardization Institute, Hunan Chuwei Semiconductor Technology Co., Ltd., Semiconductor Manufacturing International Corporation, Beijing North Huachuang Microelectronics Equipment Co., Ltd., China Microelectronics Semiconductor Equipment (Shanghai) Co., Ltd., Hefei Jinghe Integrated Circuit Co., Ltd., etc.