any idea who they are supplying so far? this is the first time I've heard of them anywhere
Guangzhou Micro-Nano Lithography Materials Technology Co., Ltd. was founded in 2020. It is the only high-tech company in Guangdong Province that specializes in developing 193nm photoresist and related materials for high-end semiconductor chip manufacturing in the 90nm-55nm process. It is a member of SMIC, Guangzhou Guangdong Core companies and other customers customize photoresist.
The company's ArF domestic photoresist research and development project began in 2016. The founder first independently developed the photoresist resin company founded in Hengqin, Zhuhai. The formula is used on ASML lithography machines (90nm, 90nm, 65nm, 55nm) has conducted a large number of evaluations. The key technical indicators of its ArF photoresist, such as DOF, have surpassed the existing top echelon commercial products and is in a leading position in the country. The headquarters is located in Huangpu District (Development Zone), Guangzhou, and has R&D centers and laboratories in Zhuhai and Shanghai.
product description:
Guangwei Nano Company has registered the "Nake" trademark and formed a series of photoresist products called "Nake". Our company's photoresist technology is 100% developed locally and has completely independent intellectual property rights. Among them, in the ArF photoresist series, there is ArF dry photoresist with excellent performance. After evaluation at SMIC's Beijing 55 nm node production line, the result is that the DOF is greater than 300 nm@ 81 nm L/S, which is better than the existing commercial ArF dry photoresist.
In terms of raw materials: the company has the right to use the patented technology of ArF photosensitive resin and photosensitizer used in the product. All photolithographic collagen materials are exclusively supplied by the Zhuhai company, ensuring exclusive competitiveness.