Building an ALD+CVD dual technology platform, a variety of CVD equipment has been launched.
The company has formed a system with ALD technology as the core and CVD and other vacuum coating technologies as a step-by-step development system. Products include ALD, PECVD, LPCVD equipment, etc. In terms of ALD equipment, both TALD and PEALD have mature models, and have developed a variety of deposition materials. They have received orders in the fields of logic, storage, compounds, and new displays, and are expected to continue to bloom in the future. A variety of CVD equipment has been launched. PECVD equipment can deposit SiO2, SiN, Lok, etc., and LPCVD equipment can deposit SiGe, p-Si, dopeda-Si, SiO2, SiN, etc. The first CVD equipment has been shipped to the client in July 2023.
The company has formed a system with ALD technology as the core and CVD and other vacuum coating technologies as a step-by-step development system. Products include ALD, PECVD, LPCVD equipment, etc. In terms of ALD equipment, both TALD and PEALD have mature models, and have developed a variety of deposition materials. They have received orders in the fields of logic, storage, compounds, and new displays, and are expected to continue to bloom in the future. A variety of CVD equipment has been launched. PECVD equipment can deposit SiO2, SiN, Lok, etc., and LPCVD equipment can deposit SiGe, p-Si, dopeda-Si, SiO2, SiN, etc. The first CVD equipment has been shipped to the client in July 2023.