How old are those projections?
Other than having cash, Huawei is not as good a partner as the big three were for ASML. AFAIK, ASML did not do the research on EUV light generation itself, but outsourced it to companies like Cymer, Xtreme and Gigaphoton. When it became clear that Cymer's LPP solution is the most mature, they bought the company in 2012.
About 2006. Your original question about power number from Harbin institute of tech DPP is it IF power. Yes it is. I thought it was source power originally. I was wrong. Only IF power, which is the final filtered/collected power make sense for the application because source power still unfiltered.
ASML is equivalent to SMEE, the final assembly house for EUV equipment., It gets components from everywhere.
Huawei doesn't have to good at the field but its money would be very helpful. Chinese academy of science, Harbin institute of technology, Chanchun institute of optics are quite strong on research. They just need money.
Money will go a long way. For EUV projection started 15 yrs ago, CAS, Harbin institute of tech , and Chanchun of optics probably has budget of in thr range $200K. Usually, there's not a whole of money from government for research institutions. One of invoice for the set of mirrors used in this project is about $20K.
Now if industry players joined in and set up an consortium for EUV alliance and funding for like$50million. That would make a huge difference. Players like huawei, SMIC, ZTE, Byd, Gree, Baidu, Alibaba.. $50million -$100million easily doable for those big guys.,
Research is best when doing through trial and error. It will take alot of money and time but this process will exhaust all possible ways. Through this style will all ins/outs will be studied.
If 15 years ago, big funding and trial and error, an optimal industrial grade solution would be arrived by now.
As of now, China has a research EUV prototype but industrial grade solution effort just started.
