Chinese semiconductor industry

The ceremony for the delivery of 500 sets of 12-inch vertical furnaces from North Huachuang was grandly held


  On June 2, 2023, the ceremony for the delivery of 500 sets of 12-inch vertical furnaces from NAURA was grandly held at the headquarters in Yizhuang. The delivery of 500 units not only marks that NAURA's 12-inch vertical furnace has become the preferred equipment for mass production of domestic mainstream customers, but also fully proves that customers have widely recognized the performance and quality of NAURA's 12-inch vertical furnace.

  Today, North Huachuang has formed a total of 23 series of vertical furnace equipment including oxidation, annealing, and film deposition, basically realizing the full coverage of vertical furnace processes. North China's innovative furnace has won high recognition from the market for its high-precision temperature control capability, good film formation uniformity, and advanced metal and particle pollution control technology. It is widely used in logic, storage, power, special processes, and large silicon It is the main equipment for mass production of 12-inch mainstream production lines in China and Southeast Asia.

The delivery of more than 500 units is not only an excellent answer sheet for the industrialization of domestic vertical furnaces by NAURA, but also a solemn commitment made by NAURA at a new historical starting point—to create excellent products and provide customers and the industry with better products. Competitive products and services; continuous innovation to promote the domestic vertical furnace equipment industry to be better and stronger!​

Xuzhou Bokang strives to make a breakthrough from raw materials, realizes the coverage of the entire industrial chain of "monomer-resin, photoacid-photoresist", and has made substantial progress in ensuring the safety, independence and controllability of the domestic photoresist material industry chain breakthrough. At present, ArF/KrF monomer and photoresist, G-line/I-line photoresist, electron beam photoresist series products have been successfully developed, which are widely used in integrated circuits, discrete devices, advanced packaging, etc., and customers cover domestic and Japanese , South Korea and other major integrated circuit leading manufacturers in the Asia-Pacific region. Among them, ArF-immersion products are already suitable for 28-45nm process.

Strong R&D team with rich professional capabilities in photoresist R&D and manufacturing

The core R&D team of Xuzhou Bokang is composed of experts in lithography materials and lithography technology at home and abroad. There are more than 200 R&D personnel in the company, of which more than 85% are undergraduates, and more than 35% are masters and doctors. They have rich professional capabilities in organic synthesis, polymer polymerization formula functional materials, and semiconductor-grade electronic-grade purification. By May 2023, there were 116 invention patents under review and 65 invention patents authorized. The company's R&D center is located in the Science and Technology Oasis of Caohejing Development Zone, Songjiang, Shanghai. It has 8,000 square meters of advanced modern laboratories, including more than 500 square meters of 100-level dust-free yellow light laboratories to support the development of photoresists. At the same time, it is equipped with advanced photolithography testing equipment and Other physical and chemical testing equipment such as ICP-MS, HPLC, GC, IR, etc.