This clarifies the little mistery of how is ICRD doing 55nm if they have only a SSA800. Now it is even more confirmed the SSA800 version with 90nm resolution can be used for critical layers for nodes up to
65nm, not 55nm, as
@hvpc correctly stated.
Regarding this 28nm machine at IRCD, we have two options:
1. IRCD is using the real one with immersion included
2. IRCD is using the 28nm machine
but without immersion, This is possible because the optical system of the 28nm machine has
0.93NA dry instead of 0.75NA for the SSA800. So it can be used to process 55nm nodes even if immersion is not present.
I'd would bet on the number 2, because according to havoc, the full 28nm machine with immersion included is still at prototype stage at SMEE's.