Chinese semiconductor industry

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tokenanalyst

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The Lingang R&D and manufacturing center of the heart-to-chip semiconductor project started construction.​


Shanghai Xinxinlian Semiconductor Technology Co., Ltd. is a core supplier of semiconductor high-end manufacturing equipment and technology jointly built by Xinyang Silicon, Yuanzhi Xinghuo and Shanghai Xinyang. It focuses on the development of front-end Damascus metal interconnection technology, aiming at Break through the long-term foreign technical barriers through independent research and development, fill in the gaps in electroplating equipment made of advanced semiconductors in China, and improve the domestic semiconductor equipment supply industry chain.

The Lingang Park of Minhang Development Zone is located in the core bearing area of "Oriental Chip Port" in the Lingang New Area, with a superior geographical location and relatively complete supporting facilities. Through precise docking and chain-type investment promotion, the gathering situation of leading semiconductor equipment and semiconductor material enterprises has initially formed, and has become a key link in the ecological layout of the semiconductor industry of "Oriental Chip Port". The core-to-core connection project in the first phase of Zhixinyuan focuses on the research and development and manufacture of advanced copper interconnection, and the metal interconnection process is an indispensable process link in the production and manufacture of integrated circuits, especially when integrated circuits require more complex device structures , higher performance, the process capability of metal interconnection is more important, and the core-chip interconnection project will undoubtedly further strengthen the integrated circuit industry chain in Lingang Park.

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tokenanalyst

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Zunxin Intelligent Technology completed tens of millions of yuan in angel round financing, focusing on the field of semiconductor equipment AMHS.

Suzhou Zunxin Intelligent Technology Co., Ltd. (hereinafter referred to as "Zunxin Intelligent Technology") has recently completed tens of millions of yuan in angel round financing. This round of financing was led by Shenzhen Tongchuang, followed by Xie Li Capital. The raised funds will be mainly used in three aspects: the research and development and mass production preparation of Stocker in the AMHS system, the research and development of the OHT crane system and overseas layout.

Founded in 2020 , Zunxin Intelligent Technology is a semiconductor fab equipment company, focusing on the production, research and development and sales of AMHS (Automatic Material Handling System). AMHS is one of the core systems that can directly affect the efficiency of material handling in semiconductor fabs. The deployment of AMHS systems can optimally improve the mass production efficiency of advanced process fabs. However, the current global semiconductor AMHS market is mainly occupied by Japanese companies, and technology autonomy is a key issue to be solved. In recent years, the scale of China's semiconductor industry has continued to expand, and the AMHS market has broad prospects.

In the fab investment, only the capital investment of the AMHS system will account for about 5% , which is an indispensable part of the fab. Chip manufacturing has high requirements on technology and environment - advanced 300mm semiconductor factories require a dust-free and clean environment, and implement an unmanned and non-stop management mode. Therefore, the requirements for the automation and intelligence of the entire factory operation are very high, which makes how to improve the space utilization rate of the entire clean factory, reduce the idle time of the machine, and improve production efficiency and product yield become the most concerned issues. The AMHS system can realize unmanned automatic transfer between complex processes in a clean environment, improving operational efficiency while ensuring quality and yield. Therefore , the AMHS system is the first choice for large-scale mass production of 300mm advanced technology fabs to improve production efficiency. With the development of industry technology, AMHS has also been widely used in various semiconductor manufacturing processes such as 300mm silicon wafer manufacturing, chip manufacturing, and advanced packaging.

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FairAndUnbiased

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Zunxin Intelligent Technology completed tens of millions of yuan in angel round financing, focusing on the field of semiconductor equipment AMHS.

Suzhou Zunxin Intelligent Technology Co., Ltd. (hereinafter referred to as "Zunxin Intelligent Technology") has recently completed tens of millions of yuan in angel round financing. This round of financing was led by Shenzhen Tongchuang, followed by Xie Li Capital. The raised funds will be mainly used in three aspects: the research and development and mass production preparation of Stocker in the AMHS system, the research and development of the OHT crane system and overseas layout.

Founded in 2020 , Zunxin Intelligent Technology is a semiconductor fab equipment company, focusing on the production, research and development and sales of AMHS (Automatic Material Handling System). AMHS is one of the core systems that can directly affect the efficiency of material handling in semiconductor fabs. The deployment of AMHS systems can optimally improve the mass production efficiency of advanced process fabs. However, the current global semiconductor AMHS market is mainly occupied by Japanese companies, and technology autonomy is a key issue to be solved. In recent years, the scale of China's semiconductor industry has continued to expand, and the AMHS market has broad prospects.

In the fab investment, only the capital investment of the AMHS system will account for about 5% , which is an indispensable part of the fab. Chip manufacturing has high requirements on technology and environment - advanced 300mm semiconductor factories require a dust-free and clean environment, and implement an unmanned and non-stop management mode. Therefore, the requirements for the automation and intelligence of the entire factory operation are very high, which makes how to improve the space utilization rate of the entire clean factory, reduce the idle time of the machine, and improve production efficiency and product yield become the most concerned issues. The AMHS system can realize unmanned automatic transfer between complex processes in a clean environment, improving operational efficiency while ensuring quality and yield. Therefore , the AMHS system is the first choice for large-scale mass production of 300mm advanced technology fabs to improve production efficiency. With the development of industry technology, AMHS has also been widely used in various semiconductor manufacturing processes such as 300mm silicon wafer manufacturing, chip manufacturing, and advanced packaging.

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This has been a historical weak point yet is a huge affector of fab productivity as the bottleneck is frequently how fast wafers can be delivered, and became even more important during the 300 mm shift.
 

european_guy

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havok:你可以关注ICRD嘉定厂的55nm什么时候开始试产,因为用的是28nm机

havok:You can pay attention to when the 55nm trial production of ICRD will start, because the 28nm machine is used

This clarifies the little mistery of how is ICRD doing 55nm if they have only a SSA800. Now it is even more confirmed the SSA800 version with 90nm resolution can be used for critical layers for nodes up to 65nm, not 55nm, as @hvpc correctly stated.

Regarding this 28nm machine at IRCD, we have two options:

1. IRCD is using the real one with immersion included

2. IRCD is using the 28nm machine but without immersion, This is possible because the optical system of the 28nm machine has 0.93NA dry instead of 0.75NA for the SSA800. So it can be used to process 55nm nodes even if immersion is not present.

I'd would bet on the number 2, because according to havoc, the full 28nm machine with immersion included is still at prototype stage at SMEE's.
 
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tokenanalyst

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1. IRCD is using the real one with immersion included

2. IRCD is using the 28nm machine but without immersion, This is possible because the optical system of the 28nm machine has 0.93NA dry instead of 0.75NA for the SSA800. So it can be used to process 55nm nodes even if immersion is not present.

1. The 0.75 NA lens system with a conversion kit to immersion lithography.
Having a conversion kit it would help to convert dry ASML scanners into immersion. Just in case.

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2- A 0.93 catadioptric dry projection optical system, a simple step to full 1.35 NA immersion.
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3- The most likely. Is simple easier to design, test and debug the immersion machine in a 55nm process node than in a 28nm process given the fact that even with Immersion 28nm require double patterning techniques.
 

Reclaimer

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According to people interview by SCMP, Chinese factories are looking into second-hand sellers for foreign chip-making equipment, and the prices of those are rising quickly up. This is because they are looking to "expand or upgrade their production". Why not put those on hold, and instead of relying of foreign equipment that will be more and more expensive, start securing supplier deals with local manufacturers?

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tphuang

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This is kind of interesting. A lot of good development from 哈工大.
planar grating inferometer
150W EUV light source.
and also high speed light light source. I assume that's referring to the EUV light source.

The planar grating part, he probably just got from havok. I would be curious about the euv part.
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