Interesting, it seems Huawei and their partners with would need to possess a small scale technology demonstrator to be able to overcome the issue described in the patent. It's not something you would want to rely solely on computational simulation (if that's even possible) and if you were going to patent this process, you would expect the proof of concept to have been verified through some means otherwise the patent is vaporware. Although we can't infer any capabilities or specs like throughput, this is excellent for multiple reasons:
1) Even if this is a small scale prototype/demonstrator, it means they have actively solved or are working on solving many of the workflow sequences for EUV lithography.
2) To be able to solve the experimental problem described in the patent, the prototype/demonstrator must reasonably approximate the conditions encountered during operating scenarios. Therefore, it can be reasonably inferred that the prototype/demonstrator integrates concepts that would be mirrored in a full scale system in terms of key operating principles, sub-systems.
3) The sub-systems and integration into the prototype/demonstrator must be meeting the right levels of precision, accuracy, etc. They may not be there in terms of throughput or other commercial volume specs, but they are sufficient to establish a working proof of concept. There are other components/systems that will need to evaluated for a commercial setup that aren't required in a prototype/demonstrator.
4) The fact that they worked around ASML's patent shows that China is playing its cards smartly. If they wanted, they could just void ASML patents and go with the same implementation but seeing as to how ASML brings alot of value, there is no gain in alienating them when they still bring alot of value as healthy competition (circumstances permitting).
Exciting times, look forward to seeing what else comes forward.
Bro what we gather from this forum and our distinguished members is that the power source is the only component that is inadequate, they already mastered 2 of the 3 Core tech needed for an EUVL. Late in 2019 a famous Chinese poster by the name of A-SET already gave us the preview, early on they are working on DPP and the max they able to produce is at 125W to 150W clearly not enough to be use commercially. We learned from
@WTAN that they are working on LPP together with SSMB, so Huawei RS laser may have taken the task regarding the LPP while other state scientific institution contribute on others. This whole nation approach are bearing fruits, as the Chinese are preparing for a major American onslaught or escalation next year.
Global times circa Sept 2020
Huawei teams up with CAS on technological development
By
Published: Sep 20, 2020 09:03 PM
Ren Zhengfei
Huawei is inviting professionals across China, from top research institutions to universities and companies, to join efforts in technological research as the Shenzhen-based technology giant tries to blaze a trail out of the US blockade.
Recently, Huawei executives including founder Ren Zhengfei, visited the Chinese Academy of Sciences (CAS) to discuss fundamental research and core technology development with CAS experts and scholars. The visit came just weeks after Ren and his colleagues visited four Chinese top universities to enhance professional training.
During the visit, Ren said that Huawei attaches great importance to its cooperation with the CAS.
"Based on current cooperation between Huawei and the CAS, I hope the two sides can strengthen scientific exchanges with a more open attitude, while exploring the frontiers of science and technology, and pushing the conversion of research results into economic prowess," Ren said.
CAS dean Bai Chunli also noted that the CAS has carried out "multiple-layer", "broad" and "pragmatic" cooperation with Huawei, with this kind of teamwork having produced good results.
"I hope Huawei and the CAS can cooperate closely, combining the innovation abilities of CAS and the resources of Huawei to explore frontier technologies," Bai said.
The visit again showed Huawei's thirst for a solution following the US order limiting global supply of electronic components to the Chinese tech giant, analysts said.
"Huawei's current chip inventory can sustain its market share for about two years. After that, unless Huawei can come up with a good solution to obtain chip supplies, its market share might falter, which will be a threat to the brand's competitiveness and even survival," Sun Yanbiao, head of Shenzhen-based research firm N1mobile, told the Global Times on Sunday.
That means unless policy changes come from the US government, Huawei has to develop its own tech solutions within a rather short period, pushing it to seek cooperation with academic and research powers in China.
"It would be a win-win situation for Huawei and the CAS. The CAS can help Huawei with research equipment and R&D projects, while Huawei could support some CAS projects with capital," veteran industry analyst Ma Jihua told the Global Times.
According to him, there's no guarantee that input will yield results, but considering that China's chip technologies do not lag too far behind, it's hopeful that Huawei and its partners can work out independent tech solutions that can allow China to produce high-end chips by itself.
"Faced with the US crackdown, China needs to complete technological independence in just about one-tenth of the normal time needed for such a process to take place. But it has to try," Ma said.
He added that China is also demonstrating its determination in technological independence to the world, thus prompting US enterprises to exert pressure on the US government as they would experience great losses if China could make everything on its own and no longer needs to import products from the US.
Microsoft founder Bill Gates also questioned in a recent interview whether it is good to "force China to become fully self-sufficient", adding that cutting supplies to China would cause job losses and the US would sustain the most serious damage in the long run.