More Throughput. I guess require less time to give the same dosage to the resist in mJ/cm2.How significant is Arf 60W to 40W ?
More Throughput. I guess require less time to give the same dosage to the resist in mJ/cm2.How significant is Arf 60W to 40W ?
When I was looking at the Gigaphoton website, their 20W ArF light source is claimed to be used for 90nm process, while the 40W light source was claimed to be used for 65nm. 60W was the lowest power light source used for ArF immersion.
They claim a range "60-90W." more likekly closer to 60 than 90.It seems Cymer and Gigaphoton have 90W ArF light source. So still a bit way to go to catch-up for Chinese RSLASER
strong light source, more advanced wafer production...Arf 60W đến 40W có ý nghĩa như thế nào?
Samsung is using EUV. CXMT cannot buy EUV machines because of sanctions. But I agree they should have released DDR5 a long time ago.To catch up with Samsung, CXMT needs to work harder.
Many talented engineers should join CXMT to become a 1-tier manufacturer.
To catch up with Samsung, CXMT needs to work harder.
Many talented engineers should join CXMT to become a 1-tier manufacturer.