Chinese semiconductor industry

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antiterror13

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When I was looking at the Gigaphoton website, their 20W ArF light source is claimed to be used for 90nm process, while the 40W light source was claimed to be used for 65nm. 60W was the lowest power light source used for ArF immersion.

It seems Cymer and Gigaphoton have 90W ArF light source. So still a bit way to go to catch-up for Chinese RSLASER
 
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