Domestic manufacturers all make efforts to cut, grind and polish equipment
In addition to silicon carbide crystal growth furnace equipment, silicon carbide cutting, grinding and polishing equipment, which is occupied by Japan's Takadori for more than 80%, has become the common choice of Shangji CNC, Yujing, Han's Laser, Gaoce and other manufacturers to break through.
In November this year, Shangji CNC stated on the official Weibo that the company has made a major breakthrough in the field of silicon carbide cutting, and the self-developed silicon carbide slicing equipment has been successful, opening up a precedent for "domestic substitution of imported silicon carbide equipment". Up to now, the order volume is close to 150 units, and the market share of domestic silicon carbide slicers exceeds 90%.
At the same time, Shangji CNC also pointed out that in May this year, the silicon carbide edge chamfering machine was successfully developed, and it has been sent to customers for trial use.
At the end of October, Gaoce also stated that since June 2022, the company has signed sales orders for 12 silicon carbide diamond wire slicing machines, basically covering the industry's new demand for diamond wire slicing capacity.
Han's Laser recently pointed out that the company's SiC ingot laser slicer and SiC ultra-thin wafer laser slicer, which are used in the third-generation semiconductors, are undergoing mass production verification at customers.
In November, Yujing said in an agency survey that the company has achieved full coverage of cutting, grinding and polishing processing equipment for silicon carbide materials. Due to the high hardness of silicon carbide materials, the company's wire cutting machine adopts mortar wire cutting Silicon carbide has been sold in small batches, and some silicon carbide cutting, grinding, and polishing processing equipment have been verified by many customers. The verification period of silicon carbide equipment is long. After the verification is passed, it is expected that order demand will be formed.
Huanyu CNC stated on the interactive platform in September that the company, as a professional provider of CNC grinding equipment, has grinding and grinding and polishing equipment that can be used for the processing of semiconductor materials represented by silicon carbide, which are mainly used in the grinding and polishing of semiconductor materials. Polishing and other processes.
Shenkeda also said that the chip dicing machine the company is developing can be applied to silicon carbide.
In the cleaning process after the grinding process, Shengmei Shanghai, the leading semiconductor cleaning equipment in China, launched a new type of post-chemical mechanical polishing (Post-CMP) cleaning equipment in July, which is used to manufacture high-quality substrates after the chemical mechanical polishing (CMP) process The cleaning, 6-inch and 8-inch configurations are suitable for silicon carbide (SiC) substrate manufacturing, and the 8-inch and 12-inch configurations are suitable for silicon wafer manufacturing.
Accelerated breakout of equipment in all links
In addition to silicon carbide substrates, silicon carbide equipment involves special processes such as high temperature and high energy in areas such as epitaxy, chip manufacturing, packaging, and testing. There is a gap in domestic supply, but the delivery time of imported equipment is usually more than one year, or even two years. In 2010, the development of domestic production lines was seriously restricted.
Under such circumstances, domestic equipment manufacturers have also launched silicon carbide equipment products one after another, and some leading companies already have the ability to solve the entire line of equipment. A domestic equipment manufacturer said that compared with silicon-based equipment, the silicon carbide industry is still in the early stages of development, the market demand is very strong, and related equipment has not formed a standard. Therefore, the company can cooperate with customers to carry out research and development and launch more innovative products. Innovative products, not just domestic substitutes.
In terms of epitaxial equipment, Jingsheng Electromechanical said that the SiC silicon carbide epitaxial equipment produced by the company is independently developed, designed and manufactured by the company. The core technologies have independent intellectual property rights and have been sold in batches.
Jihua Laboratory also stated in April that the 6-inch SiC high-temperature epitaxy equipment independently developed by Jihua Laboratory's high-power semiconductor research team has made a breakthrough. The core components of the equipment are all made in China, and the localization rate of the whole machine exceeds 85%.
In September of this year, North Huachuang stated at an industry conference that the company has more than 10 years of technology accumulation in the research and development of epitaxial equipment. At present, 4/6-inch SiC epitaxial equipment has signed orders for more than 100 units, and batch machines have been implemented in major mainstream epitaxial plants. Stable mass production.
In addition to crystal growth furnaces and epitaxy equipment, North Huachuang can also provide silicon carbide equipment such as etching, high-temperature annealing, oxidation, PVD, and cleaning machines.
Like North Huachuang, CETC 48 is also building a complete line of products. It stated at an industry conference held in July this year that the company took the lead in developing key equipment for silicon carbide device manufacturing in China, forming a complete set of trends. The 48 Institute of CETC has successively developed silicon carbide epitaxy equipment, high-temperature high-energy ion implantation machines, high-temperature activation furnaces, and high-temperature oxidation furnaces, and continues to develop the second-generation and third-generation models. Up to now, its silicon carbide equipment has been in the production line Application/signed contracts for more than 100 sets.
In terms of packaging and testing equipment, Crack said at the 2022 Zhangjiang Automotive Semiconductor Ecological Summit held in November that the company is optimistic about the future market of SiC and is actively investing in the research and development of silver sintering equipment for SiC device packaging. At present, the silver sintering equipment independently developed by the company has achieved proofing verification in some clients. At the same time, the "third-generation semiconductor power chip micro-nano metal sintering process and equipment research and development project" invested by the company has been identified as a key core technology (equipment) research project by the Jiangsu Provincial Department of Industry and Information Technology.
As the leader of semiconductor testing equipment in China, Huafeng Measurement and Control said that the company has entered the field of third-generation compound testing, power module testing and SoC integrated circuit testing in recent years. At present, the company has been in the forefront of the world in the field of gallium nitride testing , In the field of high-power IGBT and silicon carbide testing, it has also begun to increase gradually.
Linkage Technology also stated that the company's products have been widely used in the third-generation semiconductors, such as GaN and SiC (silicon carbide) products.
To sum up, at present, the domestic silicon carbide industry has formed a full ecological industry chain from equipment, materials, devices to applications, and is in a stage of rapid expansion. It is necessary to establish a safe and reliable domestic silicon carbide industry chain. It is foreseeable that with the rise of the domestic silicon carbide industry, it is bound to bring huge development opportunities to the above-mentioned domestic equipment manufacturers.