Demonstrating Strong Competitiveness Chip Acer's Micro-device Lithography Equipment Has Been Sold to the Japanese Market Recently
According to news from Weibo, according to the official website of Xinqi Microdevice, the company's MAS6 direct writing lithography equipment has recently been successfully sold to the Japanese market. The MAS6 direct writing lithography machine is suitable for digital imaging systems for mass production of IC packaging substrates. Using DMD technology, it can achieve a height resolution of 6μm.
According to the data released by China Taiwan Circuit Board Association (TPCA), at present, the precision requirements of high-end products such as HDI boards and flexible boards have reached 15-30 μm, and IC substrates have the highest technical requirements, with a minimum line width requirement of 5 μm. Japan occupies the forefront of advanced manufacturing of substrates in the world and guides the development direction of global IC substrates. The successful entry of Microdevice direct-writing lithography equipment into the Japanese market has proved the competitiveness of Microdevice in this field.
According to reports, the MAS6 direct-writing lithography machine equipment of Xinqi Micro Devices is specially developed for the customer needs of mass production of L/S: 10/10μm nodes in the field of IC substrates (FC-BGA substrates, FC-CSP substrates). The equipment adopts DMD direct imaging technology, and cooperates with reasonable optical path design, so that the resolution accuracy can reach 6/6μm; adopts high-precision precision displacement platform system, and cooperates with high-precision environmental temperature control, so that the alignment accuracy can reach 5μm. At the same time, each optical path is equipped with an active focus module, so that the optical path follows the height fluctuation of the substrate during the exposure process, and always works on the best focal plane, ensuring the production yield of precise analysis. The moving towlines inside the equipment are all dust-free towlines to ensure that there is no dust or debris during long-term use, and the yield rate is further guaranteed.
Figure: Microchip MAS6 direct writing lithography machine
According to the data, Xinqi Microdevice specializes in the R&D and production of direct imaging equipment and direct writing lithography equipment with micro-nano direct writing lithography as the core technology, and has sold equipment products to more than 300 customers. Since its establishment in 2015, it has shipped more than 700 units in the field of semiconductor equipment. In terms of products, the technical level of the PCB series LDI equipment of Xinqi micro-package is in the leading position in China, and has reached the technical level of major overseas manufacturers. Among them, compared with the current mainstream traditional exposure equipment, Mas 50T has the advantages of higher precision and higher production capacity. In addition, MAS6/8 can be applied to IC substrates in the pan-semiconductor field, and has global competitiveness.
Microdevice said that the company's equipment has successfully developed the Japanese substrate market, reflecting customers' high recognition of the technology and quality of Microdevice's products, and at the same time providing Microdevice with a broad market expansion space.
Is incredible to think that HDI board manufacturing is reaching lithography resolutions of mid 70s chips.