First public release immersion scanner may not be the first ever built.funny you mention that. If you recognize this to be the norm, how do you support any claim that the fist immersion scanner SMEE ever build could be good enough to already support 28nm HVM, on its first attempt no less? just curious what your latest assessment is on SMEE?
I have nothing to say about SMEE because it is outside my regime of knowledge and they haven't updated their website in over 10 years. But companies can change quite a bit in 10 years.