Great news.
Shengmei Shanghai enters the coating/developing track market to meet the photolithography process needs of semiconductor integrated circuit manufacturers
The new T rack equipment makes full use of Shengmei Shanghai 's deep technical foundation in the field of adhesive development , and the ArF model will be delivered in the fourth quarter.
Shengmei Semiconductor Equipment (Shanghai) Co., Ltd. ( hereinafter referred to as "Shengmei Shanghai" ) (Science and Technology Innovation Board stock code: 688082 ), as a leading provider of wafer process solutions for semiconductor front-end and advanced wafer-level packaging applications The supplier, successfully launched gumming and developing Track equipment today, marks that the company has officially entered the gumming and developing Track market, which is also the inevitable result of the company's promotion of its professional technology in the fields of cleaning, gumming and developing. Shengmei Shanghai developed the first encapsulation coating machine and developing machine in 2013, and delivered it to the customer in 2014. Shengmei Shanghai will deliver the first ArF process adhesive development Track equipment to Chinese domestic customers in a few weeks, and will launch the i-line model equipment in 2023. In addition, the company has started research and development of KrF type equipment.
"I am honored to announce that Shengmei Shanghai has officially entered the Track market, which will become another major new product category for us. Gartner data shows that the global Track market will reach US$3.7 billion in 2022. This is the development of Shengmei Shanghai. New opportunity. Thanks to Shengmei Shanghai's core competitiveness in software and robot technology, coupled with the excellent performance of adhesive development equipment and a new structure with global patent application protection, we can successfully enter the Track market with competitive products and services , which also marks a critical first step in meeting current and future front-end lithography process needs. Given that global logic and memory manufacturers are looking for second suppliers, we believe this new product will have a huge impact. demand potential,” said Dr. Wang Hui, chairman of Shengmei Shanghai.
Shengmei Shanghai Coating and Developing Track equipment is an equipment used in 300mm wafer process, which can provide uniform downdraft, high-speed and stable manipulator processing and powerful software system, so as to meet the specific needs of customers. The multi-function equipment can reduce product defect rate, increase production capacity and save total cost of ownership (COO). The gumming and developing Track equipment will support various photolithography processes including i-line, KrF and ArF systems.
The gluing and developing track equipment supports the photolithography process, which can ensure that the process requirements are met, and at the same time optimize the gluing and developing steps before and after the wafer is exposed in the lithography equipment. The equipment is specially designed for 300mm wafers, and has 4 loading ports suitable for 12-inch wafers, 8 coating chambers, and 8 developing chambers. The equipment chamber temperature can be precisely controlled at 23°C ±0.1°C, the baking range is from 50°C to 250°C, and the wafer breakage rate is less than 1/50,000. In addition, the new structural design protected by the global patent application can also be expanded to support 12 glue coating chambers and 12 development chambers, and the production capacity of wafers per hour can reach 300 wafers. In the future, it will be equipped with more glue coating and development chambers. Under the same conditions, the production capacity of more than 400 pieces per hour can be achieved.