Ocean Optics spectrometer products are constantly innovating, providing customers with a variety of tools to help innovation. Dr. Sun Ling, Sales President of Ocean Optics China, said: "The spectrometer is a core device, and Ocean Optics is the 'Lego' of the spectroscopic industry. We define ourselves as the founder of scientific instrument innovation, and we give customers an all-inclusive toolbox for Customers provide a complete set of tool modules for making innovative instruments, and customers can use this toolbox to carry out their own development in semiconductor and other fields and realize their own innovative ideas."
Etch Endpoint Monitoring: Plasma Inspection Systems
In the semiconductor industry, wafers are fabricated and manipulated using photolithographic techniques. Etching is the main link. When etching on the wafer surface, plasma monitoring can be used to track the extent of the etching through the wafer layers, determining when the plasma has fully etched a particular layer and reached the next layer. By monitoring the emission spectrum produced by the plasma during etching, the etching process can be accurately tracked. This endpoint detection is critical for the production of semiconductor materials using plasma-based etching processes .
Plasma monitoring can be done with a flexible modular setup based on the Ocean HDX spectrometer for monitoring changes in the argon plasma emission spectrum after the introduction of different gases and nanoparticles. Measurements were performed in a closed reaction chamber, coupled to a spectrometer using an optical fiber and cosine corrector, and observed through a small window in the reaction chamber. Measurements show that the modular spectroscopic assembly can acquire plasma emission spectra in real time. Plasma properties determined by emission spectroscopy can be used to monitor and control plasma-based reaction processes.
Ocean HDX adopts high-definition optical system, which features high throughput and high thermal stability, and supports multiple communication modes, such as USB, Gigabit Ethernet, Wi-Fi, AP Wi-Fi and RS-232. Built-in on-board cache data processing module to improve data analysis speed and ensure data integrity.
Modular spectrometer configuration can be used as a QC tool or integrated into a production line
Film Thickness Inspection: Wafer Film Thickness Measurement System
The production of semiconductor integrated circuits is based on dozens to hundreds of times of coating, lithography, etching, film removal, and flattening. The thickness and uniformity of the film directly affect the quality and output of the chip . Continuous testing in order to control the thickness of the film layer. Optical thin film thickness gauge is one of the indispensable equipment in the semiconductor production process, which is used to detect the coating thickness of chip wafers and related semiconductor materials.
Ocean Optics film thickness measurement system is equipped with sampling platform, reflection probe, etc. Based on the interference phenomenon of light waves, the light beam is irradiated on the surface of the film. Since the incident medium, film material and substrate material have different refractive index and extinction coefficient values, the light beam Reflection occurs on the upper and lower surfaces of the transparent/translucent film, and the reflected light waves interfere with each other, thereby forming interference light. The intensity of these interference lights at different phases will vary with the thickness of the film. Through the detection of interference light, the thickness of the film can be calculated by combining with an appropriate optical model.
Wafer Thickness Measurement System Configuration
The QE Pro is a high-sensitivity, high-performance spectrometer suitable for low-light applications. The QE Pro thin back-illuminated CCD detector has high quantum efficiency, and its robust design enables high signal-to-noise performance and stability. The measurement of dark noise can be optimized by selecting an internal shutter .
Solving problems is Ocean Optics' mission. "We are problem solvers; without problems to solve, there is no Ocean Optics," said Ocean Optics founder Mike Morris.
Dr. Sun Ling was deeply touched by this: "In some new application fields, there are always unsatisfactory places. At this time, we need to make new products, which require our tools to continuously improve the accuracy, strength, and temperature consistency. Inter-platform difference, consistency, etc. These are the best things Ocean Optics is good at, because we have been focusing on the field of spectroscopy for 30 years. With a solid foundation and accumulation, the tools we create are used to solve practical problems. "