Grating tool tip angle measuring device and measuring method
Abstract
The invention provides a grating cutter tool tip angle measuring device and a measuring method, wherein the measuring device comprises a base plate; a tool holder adjusting mechanism fixed on one side of the base plate is used to adjust and fix the position of the grating cutter; The light source on the same side as the tool holder adjustment mechanism is used to emit a measuring beam to the grating tool; the optical signal receiving system connected to the base plate in rotation is used to receive the reflected light from the directional surface and non-directional surface of the grating tool in a rotating manner; fixed The circular grating measurement system on the other side of the substrate is used to measure the angular displacement θ of the optical signal receiving system from receiving the reflected light of the directional surface to receiving the reflected light of the non-directional surface, then the tool nose angle of the grating tool is The invention can directly measure the cutting edge angle of the grating cutter, improve the measuring accuracy of the cutting edge angle, ensure the extrusion effect of the grating cutter on the aluminum film, and improve the production efficiency of the large-sized echelle grating.
CN114608483A
Application filed by Beijing Rslaser Opto Electronics Technology Co ltd, Changchun Institute of Optics Fine Mechanics and Physics of CAS
Description
Grating tool tip angle measuring device and measuring method technical field The invention relates to the technical field of grating scribing, in particular to a grating tool tip angle measuring device and a measuring method. Background technique Echelle gratings, which are produced by mechanical scribing, are used in the field of lithography due to their advantages in diffraction efficiency, resolution and use of wavelength bands. They are the core unit devices of immersion lithography light sources for high-end lithography machines. Since the complex grooves carved by the echelle grating are formed by extruding and polishing the aluminum film with a grating tool, the quality of the grating grooves directly affects the diffraction efficiency and stray light intensity of the echelle grating.
This one can be used in measurement equipment.
Optical path structure and spectrometer of immersion echelle spectrometer
Abstract
The invention relates to the technical field of imaging spectrometers, and in particular provides an optical path structure of an immersed echelle grating spectrometer and a spectrometer. The optical path structure includes an incident slit, a collimation system, a primary dispersion system, a secondary dispersion system, a focusing system and a detection system. The detected substance enters the incident slit, and the generated incident beam is incident on the collimation system, and after being collimated by the collimation system, it becomes a parallel beam; the parallel beam passes through the primary dispersion system. The first dispersion is carried out through the secondary dispersion system for the second dispersion to obtain a two-dimensional spectrum; the two-dimensional spectrum is imaged to the detector after being focused by the focusing system. The optical path structure and spectrometer provided by the invention not only greatly improve the efficiency and spectral resolution of the optical system, but also make the spectrometer more compact in space, and at the same time, for the refrigeration type infrared spectrometer, the stability of the system is improved.
CN114608704A
Changchun Institute of Optics Fine Mechanics and Physics of CAS