Breaking the monopoly of the United States and Japan: Tsinghua University has built a semiconductor equipment CMP and is undergoing 14nm verification
CMP (Chemical Mechanical Polishing) is a key process to achieve uniform global wafer planarization in the semiconductor manufacturing process . Integrated circuit manufacturing is the most important scenario for the application of CMP equipment, which is reused after film deposition and before lithography. In addition to integrated circuit manufacturing, CMP equipment can also be used in silicon wafer manufacturing and advanced packaging.
Huahai Qingke is currently the only manufacturer in China that can provide 12-inch CMP for semiconductors. Its products can cover 8-inch (200mm) and 12-inch (300mm) wafer production lines, and have been applied to
SMIC, YMTC, Hua Hong Group , Intel and other domestic and foreign chip manufacturers in the production line.Ye Tianchun, chief engineer of the National 02 Special Project, commented at the listing ceremony that Huahai Qingke, as a CMP equipment supplier, not only entered the wafer production line, but also became the main supplier of the wafer fab, contributing to the independent and controllable production of domestic semiconductors. made a great contribution.CMP is a key process technology necessary for the front-end process of advanced integrated circuit manufacturing, advanced packaging and other links. If the manufacture of chips is compared to the construction of houses, then each floor must be very flat, otherwise the overall performance of the chip will be affected. CMP technology is the key to the "flat construction" of nano-scale chips.
▲CMP flattening renderings
During the reporting period, Huahai Qingke's revenue grew rapidly, with total revenue of 211 million yuan, 386 million yuan and 805 million yuan from 2019 to 2021, respectively.As of the date of signing the prospectus, Tsinghua University owns 37.854% of Huahai Qingke and is the company's actual controller and indirect controlling shareholder.In this IPO, Huahai Qingke plans to raise 1 billion yuan, which will be used for "high-end semiconductor equipment (chemical mechanical polishing machine) industrialization project", "high-end semiconductor equipment research and development project", "wafer regeneration project" and "supplementary project". After deducting issuance expenses, the 4 projects raised a total of 3.49 billion yuan, nearly 2.5 times more than the amount raised.
▲Huahai Qingke plans to raise funds
In terms of customers, YMTC has been Huahai Qingke's largest customer since 2019. In 2021, YMTC will vigorously expand production and invest, and Huahai Qingke will account for 66.37% of its sales that year. In addition, SMIC and Hua Hong Group have always been among the top three customers of Huahai Qingke.It should be pointed out that YMTC is another enterprise controlled by Tsinghua Holdings; Zhang Guoming, general manager of Huahai Qingke, serves as an external director of Huahong Group.
Huahai Qingke has cultivated domestic suppliers such as SIASUN Robot Automation Co., Ltd. and Beijing Heqi Precision Technology Co., Ltd.; hydraulic components and general mechanical parts are not dedicated to semiconductor equipment. , less affected by international trade frictions.During the reporting period, Beijing Jintongchang Precision Machinery Equipment Co., Ltd. has always been the largest parts supplier of Huahai Qingke.