The published a follow up in SemiConChina 2021, sadly i didn't find it.
Chinese semiconductor industry
- Thread starter Hendrik_2000
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Japan can't go at it alone. In western markets they compete with AMAT, LAM, KLA and ASML. Westerners will always choose western over Japanese all else being equal, only when there is a gigantic advantage to choosing Japanese will they choose Japanese.
Lithography:
Nikon is outright worse than ASML, Canon competes more with SMEE
Etch/deposition:
AMAT and LAM compete with TEL (this is the most even) but TEL is dependent on the Chinese market and compete there with NAURA and AMEC.
Inspection: tons of tools here, let's talk CD SEM. Chinese companies weakest here (only Dongfang Jingyuan for CD SEM) but Japanese companies aren't all that much better, as Hitachi is still behind KLA.
Well this company manufacture inspection tools for optical CD measurement and film thickness measurement for 5nm+, 3DNand and Dram. Similar to some KLA tools.
While Dongfang makes CD-SEM tools
This are the other guys making metrology and inspection tools in China, optical and X-Ray
Ruili shines again, and optical film thickness measurement equipment is shipped to many customers again
In December , at the end of the year, Ruili shines again, and the optical film thickness measurement equipment has been shipped to many customers again, drawing a successful end to 2021 . On the road of localization of measuring equipment, it has given full play to its role as a leader.
Reli Scientific Instruments (Shanghai) Co., Ltd. was established in 2005 and is located in Zhangjiang Hi-Tech Park. The company brings together many technical experts at home and abroad, and has strong research and development strength. Through the unremitting efforts of all employees, Ruili's products have been successfully industrialized, and they are widely used in integrated circuit chip manufacturing, LED and other fields and have a considerable market share. , and also actively explore new application markets such as compounds and third-generation semiconductors, OLEDs , and optical communications.
At present, Rayleigh's film thickness measurement, defect detection and optical critical dimension measurement equipment has been adopted by nearly 20 front-end semiconductor wafer manufacturing customers in China, with a total of more than 30 units shipped, and they are used in different production processes and production lines. It has passed the verification of mass
Ruili will, as always, improve product quality, expand product applications, improve service quality, and provide customers with more advanced equipment and more comprehensive process solutions.
Looks like they are selling some tools.
In December , at the end of the year, Ruili shines again, and the optical film thickness measurement equipment has been shipped to many customers again, drawing a successful end to 2021 . On the road of localization of measuring equipment, it has given full play to its role as a leader.
12 -inch film thickness measurement equipment -TFX3000P- shipping Jiangsu customers
12 -inch film thickness measurement equipment -TFX4000E- Shipment to Beijing customers
8 -inch film thickness measurement equipment -TFX3200- Shipment to Hunan customers
12 -inch film thickness measurement equipment -TFX4000i- Shipment to Shanghai customers
12 -inch film thickness measurement equipment -TFX4000E- Shipment to Beijing customers
8 -inch film thickness measurement equipment -TFX3200- Shipment to Hunan customers
12 -inch film thickness measurement equipment -TFX4000i- Shipment to Shanghai customers
Reli Scientific Instruments (Shanghai) Co., Ltd. was established in 2005 and is located in Zhangjiang Hi-Tech Park. The company brings together many technical experts at home and abroad, and has strong research and development strength. Through the unremitting efforts of all employees, Ruili's products have been successfully industrialized, and they are widely used in integrated circuit chip manufacturing, LED and other fields and have a considerable market share. , and also actively explore new application markets such as compounds and third-generation semiconductors, OLEDs , and optical communications.
At present, Rayleigh's film thickness measurement, defect detection and optical critical dimension measurement equipment has been adopted by nearly 20 front-end semiconductor wafer manufacturing customers in China, with a total of more than 30 units shipped, and they are used in different production processes and production lines. It has passed the verification of mass
Ruili will, as always, improve product quality, expand product applications, improve service quality, and provide customers with more advanced equipment and more comprehensive process solutions.
Looks like they are selling some tools.
I don't know much about optical metrology. That stuff is conceptually amazing and I'm glad to see Chinese companies working on that.
I haven't see a lot software process simulation tools, yield analysis and data analytics tools. this company Semitronix has some products but that is an area were KLA really shines.
Also there is a lot of research in the area by Chinese technology institutes.
Do you know any Chinese company developong mask defect inspection tools like Lasertec in Japan?
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