CETC China Electric Power 45th Institute
Semiconductor equipment from the company that makes the semiconductors products for the Chinese military.
SFQ/SFQZ series wet cleaning equipment
SFQ/SFQZ series wet process equipment is widely used in integrated circuits, optoelectronic devices, MEMS and discrete devices, semiconductor material processing, solar photovoltaic and other fields. , semi-automatic and fully automatic three configurations.
DFQ series automatic single wafer wet processing equipment
With the widespread use of new microelectronic materials and the continuous reduction of device feature sizes, single-wafer wet processing equipment has been widely used. Combining years of experience in the design and manufacture of wet processing equipment, 45 institutes have developed applications for integrated circuits. (IC), discrete devices, surface acoustic wave (SAW) devices, GaAs microwave, millimeter wave devices, MEMS devices, OLED devices, advanced packaging and other industries single wafer wet processing equipment.
DFQ-3100 fully automatic metal film stripping and cleaning system is used for surface acoustic wave (SAW) devices, GaAs microwave, millimeter wave devices, MEMS devices, OLED devices and advanced packaging. 0.25~0.7mm 4"~6" standard wafer metal film peeling, rinsing and drying process with reference edge, the peeling line width can achieve CD=0.35um or more, which is the key equipment in the pre-process technology
CXS series rotary washing and drying machine
CXS series rotary washing and drying machines are mainly used for high cleanliness washing and drying processes of silicon wafers, lithography plates and other similar materials, suitable for 2-12 inch wafers, LXS series rotary washing and drying machines are mainly used for material processing , solar cells, discrete devices and other industries, the output of a single unit is large and the efficiency is high.
LXS series vertical rotary washing and drying machine
LXS series vertical rotary washing and drying machines are mainly used in the washing and drying process of wafers in the industries of material preparation, solar cells, discrete devices and so on. The product has a mature and reliable foundation, has been widely recognized by users, and has a very high market share.