It's not EUV. China EUV lithography tools are still in the research and development stage. China built a working replica of ASML EUV litho tool. But it has to redesign and work around the original design to avoid patent infringements. One way is to use a different EUV source, instead of using Laser Produce Plasma on Tin (ASML method), they are experimenting with several methods including Laser Produce Plasma on Gadolinium(rare earth) , and Discharge Produce Plasma on Tin.
The following links are summary of China R & D in EUV lithography tools. Note that publication dates are 2013 and 2015. Some of the basic EUV litho R&D go far back as 2008.