Since you work in the industry
@FairAndUnbiased . Do you think it's feasible for China to have domestic EUV by 2025-2027?
I think 14-28 nm domestic immersion DUV is going to come out soon, within 1-2 years, since ArF laser is already made so the big bottlenecks are the mechanical stage and water management system. Once you have ArF laser, it is not such a large leap to go to immersion.
Building on immersion DUV experience, the transferrable tech to EUV is only the mechanical stage. However, everything else will be different, since EUV does not propagate in air and thus you need vacuum for transmission, since EUV photoionizes air. That means everything must now be retooled from atmospheric pressure to 100% gas tight vacuum including literally every single component. That is why ASML takes so long: EUV is far more rigid in its requirements than DUV and every single part is much more expensive.
The problem is that with vacuum, outgassing becomes a huge deal, including the specific chemistry of the outgassed species since EUV can also photopolymerize contaminants on top of the wafer or on mirror optics and destroy it. You cannot have any plastics in the EUV light stream either, since they will degrade, outgas, and potentially photopolymerize elsewhere. That will require new development of all mechanical stages and optics for vacuum and EUV compatibility.
Due to the massive number of parts that must be vacuum certified or developed to be vacuum compatible instead of merely cleanroom compatible, I put EUV at 5-8 years out. A 2025-2027 timeframe is optimistic. I put it at "pre 2030".