Researcher Situ Guohai, the director of the laboratory, made a summary report of the laboratory's annual work in 2019 . In 2019 , a number of 02 special projects undertaken by the laboratory made important progress. The undertaken "lighting system development and small-batch production capacity building" project has entered the manufacturing stage at 28nm lighting system product development, and 110nm lighting system product development has been completed The system performance is self- tested and is in the integration stage; the 02 special project " Research on Multi-channel Image Quality Inspection Technology for Immersion Lithography Machine " has completed the parallel detection of 9- channel wave aberration; SMO key graphic screening technology for computing lithography research tasks , The performance is better than the similar technology in ASML 's computational lithography software. At the same time, the laboratory has made significant progress in computational optical imaging technology, using deep learning methods to achieve scatterer imaging with an optical thickness of 13.4.