Aisen has over 10 years of development history in RDL/Fine-pitch RDL applications, and has launched multiple series of products including positive, negative, and chemically amplified photoresists. Among them, the iCA 7200 series chemically amplified positive photoresists can achieve a linewidth/pitch of <2μm and an aspect ratio (AR) of over 5:1 at a film thickness of 6μm, meeting the needs of high-density interconnects.
In the field of bump/micro-bump technology, the company's 5060N and 5090N series of thick-film negative photoresists have been widely used in Cu/Ni/SnAg electroplating processes. The 5090N series maintains a 5:1 aspect ratio even at film thicknesses of 250~300μm. For gold bump processes, the 5025N series also exhibits excellent gold plating tolerance. To further meet the requirements of higher integration, Aisen Technology is developing a new generation of products with an aspect ratio of 7:1 and a resolution of 5μm via a film thickness of 35μm.
In the field of positive chemical amplification photoresists for micro-bump applications, the CA7150 series achieves 10-15μm openings with an AR ratio exceeding 5:1 at film thicknesses of 50-80μm. The company has successfully solved the problems of photo-acid quenching reaction on copper substrates and bubble formation during coating and baking by optimizing resin structure and formulation. It is currently developing ultra-thick positive chemical amplification photoresists supporting film thicknesses from 110μm (single coating) to 250μm (two coatings).
For TSV applications, Aisen Technology is developing the ICA7110 positive chemical amplification photoresist, suitable for <2μm via @8~12μm film thickness. It features high vertical morphology and excellent resistance to fluorine-containing etching gases, supports -15℃, 30-minute DRIE process, and achieves an AR ratio of 5~6:1. Furthermore, the iCA7200, ICA7110, and CA7150 product combination provides complete photoresist material support for 2.5D/3D packaging structures such as silicon interposers, partial silicon interconnects, and embedded bridging interconnects.
In the field of dielectric and buffer protective layers, Aisen has completed the full range of PSPI products, covering high-temperature curing (~350℃), low-temperature curing (200~250℃), and ultra-low-temperature curing (180~200℃) products, and has developed low dielectric constant (Dk/Df) materials to meet the needs of high-frequency applications. Some products are innovative developments to meet new customer needs, and there are currently no comparable products on the market.
Xiang Wensheng emphasized that Aisen Technology adheres to its dual-main-business strategy of "electroplating + lithography," continuously focusing on advanced node logic and memory, advanced packaging, and specialized application areas such as power/RF/display/sensing. The company has multiple R&D and production bases in Kunshan, Guangzhou, Nantong, and other locations, and successfully listed on the STAR Market in December 2023