Chinese semiconductor thread II

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Synergistic Enhancement Effects of Heterogeneous Isomorphism Clusters in Response to Irradiation: Sub-10 nm Nanolithography and Nanoscale Etching Transfer.​


Abstract​

The advancement of integrated circuit manufacturing has continuously relied on lithography technology as a fundamental driving force. However, the development of photoresists faces a resolution-line edge roughness-sensitivity (RLS) trade-off, hindering simultaneous optimization. To address this issue, we propose a collaborative strategy for heterogeneous isomorphism cluster photoresists with different radiation responses. The Ti4M4-oxo cluster platform [Ti4Zr4O6(OBu)4(OMc)16] (T4Z4), with higher sensitivity, was applied as a photosensitizer for a higher resolution photoresist of [Ti4Hf4O6(OBu)4(OMc)16] (T4H4), allowing the hybrid photoresist to effectively induce cluster cross-linking at low exposure doses, synergistically producing high-resolution patterns. This achieved an e-beam resolution enhancement from 16 to 7.5 nm, with successful fabrication of intricate patterns under 10 nm. The hybrid photoresist also exhibits the capability to etch transfer patterns below 20 nm onto silicon dioxide substrates, highlighting its potential for future device manufacturing. This work presents a new perspective on photoresist design to effectively tackle RLS trade-off limitations.

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Kunlun Core's patent for "task sending method, task execution method and device, equipment and medium" was published​



According to Tianyancha, Kunlun Core (Beijing) Technology Co., Ltd.'s patent for "task sending method, task execution method and device, equipment and medium" was announced. The application publication date is March 11, 2025, and the application publication number is CN119597410A.
The present disclosure provides a task sending method and device, equipment and medium, which relate to the field of computer technology, especially to the field of chip technology and data processing technology. The implementation scheme is: create multiple task queues including a first queue and a second queue; obtain a first data processing task for the first queue and a second data processing task for the second queue, the first data processing task and the second data processing task respectively include data to be processed, data processing instruction information and task dependency information; in response to determining that the second data processing task depends on the first data processing task, create a first monitoring task, the first monitoring task is to be terminated in response to determining that the first data processing task has been executed; store the first data processing task in the first queue; store the first monitoring task and the second data processing task in the second queue; and send the first queue and the second queue to the data processing device.

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Shanghai Silicon Industry: 300mm silicon wafer shipments will increase by more than 70% year-on-year in 2024, and the total production capacity will reach 650,000 pieces/month​



Shanghai Silicon Industry said at an investor relations event that since 2024, the global semiconductor market has shown a recovery trend, but the overall inventory level of downstream customers is high, resulting in the recovery of semiconductor silicon wafers slower than the overall market. In 2024 and the first quarter of 2025, the company's main product sales and overall revenue showed an upward trend. In terms of 300mm silicon wafers, Shanghai Lingang's new 300,000 pieces/month production capacity has been fully put into production, and the Taiyuan project has completed the construction of a 50,000 piece/month pilot line and entered the customer certification stage. The company's total 300mm silicon wafer production capacity has increased to 650,000 pieces/month. In 2024, shipments of 300mm silicon wafers increased by more than 70% year-on-year.

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Beijing releases key points to promote the development of the private economy, supports enterprises to purchase domestic GPU chips and build intelligent computing centers.​


Recently, the "Beijing 2025 Work Points for Promoting the Healthy and High-quality Development of the Private Economy" was officially released. The policy aims to promote the healthy and high-quality development of Beijing's private economy.
According to the work points, Beijing will support private enterprises in building intelligent computing centers, and will provide support to enterprises that purchase self-controlled GPU chips to provide intelligent computing services in accordance with a certain proportion of their investment amount. In addition, Beijing will also focus on supporting private enterprises in participating in the construction of green innovation platforms.
Analysts pointed out that the current US tariff policy on China is constantly changing, coupled with the increasingly stringent chip control, which makes the independent control in the field of high-end chips increasingly important. Against this background, the process of domestic substitution is accelerating, and the prospect of import substitution of domestic computing chips is promising. Against the background of domestic CSP Capex expansion, domestic chip technology continues to break through and market share continues to increase.

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