AMEC: Over 5,000 etching equipment reactors shipped worldwide
On March 12, Advanced Micro-Semiconductor Equipment (Shanghai) Co., Ltd. (hereinafter referred to as "AMEC") announced that the total number of plasma etching equipment reactors shipped worldwide has exceeded 5,000. This includes four types of equipment: CCP high-energy plasma etcher, ICP low-energy plasma etcher, single-reactor reactor and dual-reactor reactor. Plasma etcher is the most critical and largest micro-processing equipment in the market besides photolithography. Due to the smaller and smaller micro-devices and the wavelength limitation of photolithography machines, as well as the development of micro-devices from two-dimensional to three-dimensional, etcher is the fastest growing market for semiconductor equipment in the past decade. This important milestone marks that AMEC continues to be widely recognized by customers and the market in the field of plasma etching equipment, and also demonstrates that the company has entered the international forefront in the field of plasma etching.
AMEC is committed to providing leading processing equipment and process technology solutions to global integrated circuit and LED chip manufacturers. AMEC has developed two categories of CCP high-energy plasma and ICP low-energy plasma etching, including more than a dozen subdivided etching equipment that can cover most etching applications. AMEC's plasma etching equipment has been widely used by domestic and international first-tier customers, from 65 nanometers to 5 nanometers and many etching applications with more advanced processes. In the past decade, AMEC has focused on developing a variety of conductor and semiconductor chemical thin film equipment, such as MOCVD, LPCVD, ALD and EPI equipment.
In the past 20 years, AMEC's etching equipment has accumulated a large amount of chip production line mass production data and customer verification data, which can cover the vast majority of etching applications, including various high-end applications. AMEC's plasma etching equipment continues to expand its market share, and the company's shipments of CCP high-energy plasma etching equipment and ICP low-energy plasma etching equipment have maintained rapid growth in recent years. The cumulative online installed capacity of CCP equipment has increased by more than 37% annually in the past four years, and has exceeded 4,000 reaction tables; the cumulative online installed capacity of ICP equipment has increased by more than 100% annually in the past four years, and has exceeded 1,000 reaction tables. As of the end of February 2025, the company has accumulated more than 5,400 reaction tables in more than 130 production lines at home and abroad, fully realizing mass production and large-scale repetitive sales.