Update on Commercial sub nanometer precision interferometers.
Conventional Dual Frequency Interferometers and Fiber Optic Dual frequency Interferometers.
Objective Lens alignment with wafer stage
Motion Stage controller.
UPrecision, SMEE and Harbin are developing grating types interferometers with picometer precision for immersion and EUV machines but theses could definitely be used for dry ArF KrF scanners, EBL, Ion Beam Etching tools, Metrology tools and NIL.
Conventional Dual Frequency Interferometers and Fiber Optic Dual frequency Interferometers.
Objective Lens alignment with wafer stage
Motion Stage controller.
UPrecision, SMEE and Harbin are developing grating types interferometers with picometer precision for immersion and EUV machines but theses could definitely be used for dry ArF KrF scanners, EBL, Ion Beam Etching tools, Metrology tools and NIL.