NAURA's "Crystal Boat and Semiconductor Process Equipment" Patent Announced
Tianyancha shows that the patent of "Jingzhou and Semiconductor Process Equipment" of Beijing North Huachuang Microelectronics Equipment Co., Ltd. was announced. The application publication date is October 29, 2024, and the application publication number is CN118866781A.
The present invention provides a wafer boat and semiconductor process equipment, the wafer boat includes a plurality of boat pieces for carrying wafers, the plurality of boat pieces are arranged in parallel and at equal intervals, the plurality of boat pieces are divided into a plurality of sections, each section includes a plurality of boat pieces, the boat pieces in different sections are insulated from each other, each section has a connection hole electrically connected to a radio frequency adjustment component, the boat pieces in different sections can be electrically connected to a radio frequency source through different radio frequency adjustment components, and the electrode polarities of the electrical connections of adjacent boat pieces are opposite. The wafer boat and semiconductor process equipment provided by the present invention can improve the uniformity of the coating thickness of a plurality of wafers in the same process.