Hans Semiconductor Next-Generation Silicon Photonics Hidden Cutting Technology Activates Industrial Leap Forward
Amid the rapid expansion of artificial intelligence, data centers, and high-speed optical communications, silicon photonics has emerged as a critical pathway for meeting surging computing demands. In response to this industry shift, Han’s Semiconductor has launched the DSI-S-TC9261, a next-generation silicon wafer laser stealth dicing machine. Built on proprietary laser stealth dicing technology, the equipment is specifically engineered to meet the stringent processing requirements of high-density, high-precision, and ultra-thin silicon photonics chips, providing essential manufacturing support for large-scale device production.
The DSI-S-TC9261 integrates several advanced capabilities tailored to optical waveguide, lens, and module structures. It features a customized HDE optical engine and upgraded OAS system optimized for mass production workflows. The machine supports ultra-narrow dicing tracks of ≤20μm via back-cutting processes without laser-induced thermal damage, significantly improving wafer utilization and yield. It cleanly cuts delicate optical thin films while preserving waveguide and lens integrity, eliminating residue or performance degradation. Additional innovations include an infrared back-side alignment camera for precise SDAG invisible cutting, compatibility with wafers as thin as 50μm (and dies down to 200μm), and exceptional sidewall control that prevents edge chipping or micro-cracks, thereby boosting chip strength and reducing downstream packaging losses.


The equipment has already completed full-process validation with a leading domestic silicon photonics module manufacturer and is actively deployed in mass production lines. Benchmarking data confirms that the DSI-S-TC9261 operates stably and outperforms comparable imported systems, earning strong industry recognition. As wafer dicing standards continue to evolve toward higher precision, yield, and efficiency, Han’s Semiconductor’s solution delivers reliable process support that accelerates silicon photonics commercialization, strengthens domestic supply chains, and propels the broader optoelectronic interconnect industry forward.






