Hi TD739,DPP is not meant for commerical. It's experimental thing for proof of concept.
Chinese research institute used DPP for the exact reason of no high power laser available for LPP. If they the high power laser they wouldn't use DPP, its inferior.
Roger that, but the critical part which is the Optics, from WTAN
Harbin Institute of Technology has developed a Ultra Precision Machine Tool which can produce the High Precison Optical Lens for the EUV Machine.
Changchun Institute has developed a 2 Mirror Projection Lens for the EUV Machine.
Apparently the Projection Lens (Optics) has been sucessfully developed.
Attachments
-
Screenshot_20200829-235054.png
524.5 KBViews: 28 -
Screenshot_20200829-235133.png
412.9 KBViews: 26
Yes.....it looks like the CAS will be aiming to get the EUV Machine out as soon as possible. They are making the EUV machine a National priority project.Skywatcher said:
Accelerate to finish the SMEE/CIOMP EUVL prototype in 2021?
The Changchun Institute of Optics which developed the original EUV machine in 2017 is part of the Chinese Academy of Sciences, so we will see more news from this Organisation.
The Latest development on EUVL again from WTAN
Just heard from some Sources that all the Components of the EUV Machine has been developed.
Just waiting for the Systems Integrator SMEE to move ahead and assemble the Litho Machine.
Harbin Institute has developed a 150W DPP EUV Light Source.
Unfortunately the Light Source has a Short Life Span.
Because of this life span issue, SMEE is reluctant to use the DPP Light Source.
This is holding up the EUV Litho Project.
SMEE may be waiting for the LPP EUV Light Source to be released?