Does this mean China had successfully develop an EUVL? After Conquering the 3 obstacle
China has made breakthroughs in both EUV light sources and optical lenses, plus the dual-workpiece stage technology? So a possible appearance of a CHINESE EUVL in 2022?
New breakthroughs in China's EUV lithography machine, how far is it from success?
2021-10-30 20:53 HKT
Earlier, at the International Mathematics Conference, Academician Ming of Wuhan expressed his views on Chinese-made lithography machines. He believed that the world's most advanced EUV lithography machines could not be manufactured by China on its own. Why? The academician thinks so, because there are 100,000 precision parts in a lithography machine, and there are more than 5,000 suppliers among them, and they are all over the world. Now the EUV lithography machine manufactured by ASML in the Netherlands , Is also the crystallization of the wisdom of European and American countries. Therefore, Academician Wu believes that it is unrealistic for China to develop EUV lithography machines on its own.
However, the good news that has been coming recently has given us confidence, telling us that it is not impossible to make EUV lithography machines in China, and even now there is only the last step left. Today, I will show you how China conquered lithography machines.
The 3 key technologies of China.
Recently, there have been two good news in the field of lithography machines.
According to CCTV News, the Institute of High Energy Physics of the Chinese Academy of Sciences has created China's first high-energy synchrotron radiation light source equipment, and it started on June 28. Installation, in addition, the test platform that provides technical support for this light source equipment has also begun trial operation.
At the same time, CCTV News also reported that Zhongke Kemei has developed a linear Lloyd lens coating device and a nano-focusing mirror coating device. This device has also been officially put into use on June 28.
The names of these two technologies sound tall, so what are they used for? First, we have to understand the specific structure of the lithography machine.
The lithography machine has a total of three core components, which are dual workpiece tables, and the second is EUV. The light source, the third is EUV optical lens, as the name suggests, high-energy synchronous light source equipment, is the equipment used in EUV light source.
The light source is the core of the lithography machine. The main technology of the chip manufacturing process is the light source. Today, the high-energy synchronous light source developed by the Chinese Academy of Sciences is currently the brightest light source in the world. The fourth-generation synchrotron radiation light source can reduce the high-end The difficulty of the chip for the process of lithography equipment meets most of the aerospace and semiconductor sweat requirements for the light source process, which means that China's EUV lithography machine has overcome one of the most core technologies, and China's EUV lithography machine finally Have a foundation.
The equipment of the Chinese Academy of Sciences has broken through the technology of the light source, and the two major coating equipment launched by the Science and Technology Co., Ltd. are related to the optical lens in the lithography machine. In the EUV lithography machine, a light lens is required, except for the lens material. In addition, the core technology is actually the optical coating. Optical coating can be understood as a layer of film on the lens. We usually see it on camera lenses, glasses, astronomical telescopes and other equipment, although it is only a thin layer or Several layers of film, but a good coating process can control the reflection, filtering, polarization and other requirements of optical parts on light.
Previously, China was not technologically advanced in this area. Japanese companies such as Nikon, Sony, Germany's Leica, and Zeiss have far surpassed China's technology in this area. It can even be said that there is no decent optical company in China at all. The reason why many high-end instruments and equipment are monopolized by foreign countries.
The lens of the lithography machine also has very high requirements for optical coating. The lens finish of the EUV lithography machine must not exceed 0.05 nanometers. Currently, only Zeiss in Germany can produce lenses that meet the requirements, and there are only 20 related engineers. First, the level of the coating equipment launched by the Science and Technology Co., Ltd. is already the most difficult vacuum coating process at present. Although it has not reached the level of Zeiss, it can also control the accuracy of the film thickness within 0.1 nanometers, and more importantly Yes, all the technology of this equipment is completely in the hands of China. The emergence of this coating equipment can make China more advanced in the development of EUV lithography machines. Today, the installation of high-energy synchrotron radiation light source equipment has been completed by 70%. The installation will be completed smoothly in 2022.
In terms of light source, in addition to equipment, there is also an extreme ultraviolet light source technology that is equally important. It is the most direct lithography equipment for wafers in lithography.
The Chinese Academy of Sciences has also made breakthroughs in this regard, and proposed a new type of particle accelerator. , Can cover the light source needed by EUV lithography machine.
China has made breakthroughs in both EUV light sources and optical lenses. But in terms of the technology of the dual-workpiece stage, in fact,
the dual-workpiece stage technology has made breakthroughs a long ago. The main function of the dual-workpiece stage is to carry The wafers follow the predetermined route and complete the required actions of lithography through a predetermined movement. Previously, only the Dutch ASML company had mastered the technology. However,
in 2020, the Chinese private enterprise Beijing Huazhuo Jingke will use 4 years of Time completed the breakthrough of this technology and broke the monopoly of the Dutch company ASML.
Therefore, in
China today, breakthroughs have been made in the three core EUV technologies. This means that it may really be possible for China to complete the independent research and development of EUV lithography machines. Moreover, China has a huge market The production of 100,000 parts for the engraving machine may not be a problem.
It seems that China is very close to high-end lithography machines, but I have to pour cold water here. In fact, China's technology accumulation on EUV lithography machines is still far from good. Although China has broken through the coating technology, it is far from the lens. There is still some time to make it. In fact, many subsequent parts are like this. Even if it is a key technological breakthrough, other things still need to be tried and overcome.
From the development of technology to the appearance of actual products, it takes a long time. China has already walked more than half of this road, and only the final step is left. However, it takes a lot of time in China. In the short term, China will still It is difficult to complete. However, the EUV lithography machine independently developed by China is at least hopeless. As long as there is a chance, China will never give up.
China's inability to make breakthroughs in high-end lithography machines means that China's high-end chips still have to be controlled by others. Fortunately, China is not in a hurry. Under the background of the global chip shortage market, it has created opportunities for China's chip industry and also given China. For more time, it is impossible to have high-end chips in the short term. In fact, the impact on China is not too great, because according to the current level of technology, most high-tech equipment does not need to use too high-end chips, 3 nanometers Such chips are not widely used. In the next few years, they will only be used on mobile phones, and it will take longer to make breakthroughs in chips.
Therefore, it has been a long time for China to develop EUV lithography machines. Perhaps by that time, the United States may not be able to continue sanctions against China. Of course, we cannot pin our hopes on the United States. Only our own breakthroughs can completely lift the restrictions of the United States.
In addition, China's chip breakthroughs may not necessarily require die-hard silicon chips. At last year's Graphene Conference, China demonstrated 8-inch graphene wafers, which means that there is a new member in the chip field. In this regard, China has already led the world, and perhaps China will achieve a corner overtaking of the chip on the graphene chip.