Via vincent
Not sure if this have been posted before. A little old
CMP equipment for 200nm production line from CETC are being used by SMIC, Huahong, TSMC, UMC, etc.
CLP's 200mm polishing equipment has entered domestic major lines such as SMIC, Huahong Hongli, TSMC, UMC, etc.
1.2w
Source: Aijiwei
#电科设备#
#中电科#
07-09 11:43
According to the news from the micro-net, at the Beijing Yizhuang Innovation Conference held on July 8, CEC Electronic Equipment Group Co., Ltd. (hereinafter referred to as: Electrical Equipment) announced that the ion implanter, chemical mechanical polishing equipment (CMP), Technological breakthroughs such as wet process equipment.
Picture source: Beijing Yizhuang
The ion implanter is the key equipment in the pre-process of integrated circuit manufacturing, and the difficulty is second only to the photoetching machine. It causes changes in the surface composition, structure and performance of the material by doping the area near the surface of the semiconductor.
Li Jin, director of the electrical equipment strategic planning department, revealed that electrical equipment has realized the localization of the full spectrum of ion implanters, which can provide chip manufacturers with a one-stop solution for ion implanters.
According to Beijing Yizhuang News, China Electronics Technology Group also released domestically produced chemical mechanical polishing equipment. As one of the core equipment for integrated circuit manufacturing, chemical mechanical polishing equipment is an indispensable equipment for the copper interconnection process.
Among them, 200mm polishing equipment has entered domestic major lines such as SMIC, Huahong Hongli, TSMC, UMC, etc., and has been hailed as "the only domestic equipment supplier with a replacement rate of 100%" by SMIC.
In addition, according to Chinanews.com, Li Jin introduced that the 8-inch chemical mechanical polishing equipment for electrical equipment has a market share of 70%, and the 12-inch CMP has entered customer verification and has excellent performance. The electrical equipment wet process equipment has entered the field of 8-inch integrated circuit epitaxial wafer processing and chip manufacturing. (Proofreading/Ruobing)