Chinese semiconductor industry

Research on wafer stage overlay-μDBO(micro Diffraction Based Overlay) targets by lithography imaging simulation software​

Abstract：Overlay targets with a small range and requiring extremely high measurement accuracy are used in the lithography system's alignment, exposure, and measurement processes. They are inevitably affected by many errors when performing specialized functions, e.g., line width and design difference, line edge roughness, and target edge effect. This paper conducts a simulation study on the micro diffraction-based overlay target (μDBO) in the condition of wafer stage overlay (WSO), which is commonly used in lithography, based on the design of overlay alignment targets in the field of measurement. Litho-target design simulation software is known to be more advanced than lithographic imaging simulation software, but its license is usually rarer and more expensive. We propose a novel method for simulating lithography target metrology results using lithography imaging simulation software. The method predicts the detected light intensity distribution in the experiment qualitatively and can calculate target performance in metrology.

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LanceD23 said:

a tour of SHenzhen SMIC campus outside.
Shenzhen SMIC already online in 2022. Anyone know what does it produce?

Beijing SMIC supposedly online in late 2023 but don't know how does US sanction affects its procurement and schedule of production?

Beijing SMIC online & debut of new lithography system, two things to look for in ending of 2023?

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The workhorse production GaN process today is a 180 nm “no field plate” technology that targets broadband EW applications up to 20 GHz. In 2018, the company signed a cooperative agreement with Air Force Research Laboratory (AFRL) to transfer an advanced, high-performance 140 nm GaN process developed by AFRL’s research fabrication facility to BAE’s production-focused foundry. This new process with shorter gate length and enahnced transistor performance targets applications at mm-wave frequencies up to 50 GHz.

Through this “lab-to-fab” collaboration model, BAE Systems was successfully able to transition the process, and demonstrate state-of-the-art performance on the 6-inch production line. The 140 nm GaN technology – which will be fully qualified for production in 2023 – represents the DoD’s only 6-inch process at this advanced technology node.

The next GaN technology under development is a 90 nm HEMT process that leverages advanced process features including T-gates and low-resistance ohmic contacts fabricated using n+ GaN regrowth by molecular beam epitaxy (MBE). This process primarily targets power amplifier applications at W-band frequencies (75 to 110 GHz); W-band frequencies encompass a local minima in the atmospheric absorption spectra, so it’s expected that this portion of the electromagnetic spectrum will be exploited by radars, missile seekers, SAR [synthetic aperture radar] imaging, E-band radio, and 6G applications.

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tphuang said:

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was looking up to see what node GaN MMIC (for AESA radar) are at currently. Quite interesting


So looks like most GaN for US military right now is 180nm node and they are moving to 140 nm GaN. I'd be interested in finding out where Chinese GaN TR modules are at

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TK3600 said:

Question on Loongarch systems for government use. China purchased a lot of these machines for government. Would it make sense for Chinese government to instead use Huawei products once equivalent is available? Hardware performance wise Huawei is the leader by a mile. Difference is Huawei still use some licensed foriegn tech like ARM v8 and its instruction sets. Unless government needs something related to that, Huawei will be the better procurement, no?

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TK3600 said:

Question on Loongarch systems for government use. China purchased a lot of these machines for government. Would it make sense for Chinese government to instead use Huawei products once equivalent is available? Hardware performance wise Huawei is the leader by a mile. Difference is Huawei still use some licensed foriegn tech like ARM v8 and its instruction sets. Unless government needs something related to that, Huawei will be the better procurement, no?

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Laser equipment reaches tens of millions of yuan cooperation ​

Can be used in silicon carbide fields

On November 14, Mega Technology announced that they had reached in-depth industry cooperation with Chenhao Technology and signed an order contract worth tens of millions . According to reports, their cooperation mainly focuses on market development, sales promotion and technical services of laser processing equipment.

Chenhao Technology is a semiconductor equipment technology service provider, serving OSAT, one of the top ten semiconductor packaging and testing companies in the world. Megatech is a pan-semiconductor manufacturing and testing equipment provider, and has laid out solutions for advanced packaging key processes from process cutting to wafer inspection, packaging inspection and other key processes. Magega's laser cutting machine can be used for cutting silicon materials and SiC wafers.

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tokenanalyst said:

The Huawei effect pushing Xiaomi localization drive

Xiaomi Redmi launches 2 trillion output value plan and announces list of domestic IC supply chain partners.​

View attachment 121845

Redmi announced a list of Chinese industry chain partners, including: TCL Huaxing, AAC, OV Howey Group, Lens Technology, Longqi Group, Sunwoda, Bourne, Visionox, Tianma, Sunny Optical, and Goodix Technology , Guanyu, Changxin Storage, Zhuosheng Micro, Awinic Electronics, Silicon Power, Weijie Chuangxin, Huaqin Technology, Wingtech Technology, Lingyi Intelligent Manufacturing, BYD Electronics, Tongda Group, OFILM, Goertek.

Redmi said that together with its partners in China's industrial chain, we believe that persisting in "hard-core innovation" is the proposition of the times, taking root in China and "linking" to the world is an inevitable choice, and "self-reliance and self-reliance while cooperating and opening up" is the only way to continue to develop. The rise of billion-level industrial clusters will reshape the global value chain.

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