Chinese semiconductor industry

Labtech Releases Inductively Coupled Plasma Triple Quadrupole Mass Spectrometer to Improve Chip Yield

LabTech releases triple quadrupole mass spectrometer, deeply entering the semiconductor industry​

Beijing Lab Tech Instrument Co., Ltd. (hereinafter referred to as "Lab Tech") has made another major breakthrough in the field of independent R&D and innovation in the field of high-end scientific instruments. On March 10th, "Knowledge and Actions Followed by Actions--LabTech Semi-conductor Industry Triple Quadrupole Mass Spectrometry New Product Release Conference" was grandly held at LabTech's Beijing headquarters, launching LabMS for the research and development and production of the semiconductor industry 5000 ICP-QQQ Inductively Coupled Plasma Mass Spectrometry. Ms. Shi Ying, Secretary-General of the Integrated Circuit Materials Industry Technology Innovation Alliance, Mr. Yang Fuhua, Vice Chairman and Secretary-General of the Third Generation Semiconductor Industry Technology Innovation Strategic Alliance, Researcher of the Institute of Semiconductors, Chinese Academy of Sciences, and Mr. Liu Yuanchao, Deputy Secretary-General of the China Semiconductor Industry Association, etc. The guests attended the press conference and witnessed this important moment of LabTech.

LabTech has extensive experience in innovation in the field of ICP-MS technology. Since the launch of the single quadrupole ICP-MS project in 2019, the Labtech mass spectrometry research and development team, under the leadership of Dr. Hu Ke, released the first single quadrupole mass spectrometry product in 1 year and 9 months. Realized the application expansion of domestic ICP-MS in the chip production line of the semiconductor industry. Subsequently, Labtech pursued the victory and launched the triple quadrupole mass spectrometry research and development project in the fourth quarter of 2021. In just over a year, it completed the process from project establishment, design, functional machine, trial machine, commercial machine, and The smooth progress of obtaining SEMI S2 certification from the International Semiconductor Industry Association. The release of this new mass spectrometer is the latest achievement of LabTech's commitment to providing more accurate and efficient solutions for users in the semiconductor industry after the release of the single quadrupole LabMS 3000 in 2021.




New LabMS 5000 Inductively Coupled Plasma Mass Spectrometer


LabMS 5000 is equipped with Labtech's mature pre-processing technology, and is customized according to the needs of the industry. For the semiconductor industry's high sensitivity requirements, LabMS 5000 is capable of ultra-trace element analysis and can ensure the analysis results More accurate and reliable.

"Extending knowledge and acting hard to enhance success" is the summary of Labtech's corporate philosophy of continuous advancement. "Zhizhi" represents Labtech's spirit of continuous deep cultivation of the industry, continuous learning, exploration and innovation; "Strive" represents Labtech's firm execution and action, the ability to quickly respond to customer needs and introduce new products; "Following things up" means that Labtech is willing to grow together with customers and progress together with the industry, and contribute to accelerating the process of domestic substitution of scientific instruments through continuous innovation. Therefore, today's LabTech's new product launch conference is not only a display and introduction of products, but also a joint discussion and thinking between LabTech and semiconductor industry experts and customers.

As one of the major domestic instrument manufacturers, Labtech has been deeply involved in the field of analytical instruments for 20 years, and continues to provide customers with scientific and economical detection technologies and solutions. In the eyes of customers, Labtech has long been Be their trusted partner. Moreover, Labtech has always been at the forefront of promoting the development of scientific instruments in my country. In recent years, its progress in mass spectrometry innovation has accelerated the process of domestic substitution, and it has also helped my country achieve high-level technological self-reliance and self-reliance with practical actions.

tokenanalyst said:

Labtech Releases Inductively Coupled Plasma Triple Quadrupole Mass Spectrometer to Improve Chip Yield

According to the announcement released by LabTech on the evening of March 12, on March 10, Beijing LabTech Instruments Co., Ltd. officially released LabMS 5000, an inductively coupled plasma triple quadrupole mass spectrometer developed and produced for the semiconductor industry. ICP-QQQ.
According to reports, LabMS 5000 ICP-QQQQ adopts industrial standard 27MHz solid-state generator, which has extremely high system stability; using MS/MS mode to achieve controlled and reliable interference removal, and accurately remove mass interference ions, so as to obtain lower The detection limit and accurate ultra-trace analysis results; the low-background inert sampling system integrates gas dilution and oxygen addition functions, which greatly expands the detection application range; the intelligent software platform HiMass is suitable for various analysis needs of the laboratory, and extremely Greatly improve work efficiency.
LabMS 5000 ICP-QQQ can be used to monitor inorganic element pollution of semiconductor silicon materials, third-generation semiconductor materials, wet electronic chemicals, electronic special gases, process solvents/photoresists, etc., and has passed SEMI S2 and SEMI E78 in the semiconductor industry Certification helps semiconductor chip manufacturers control product quality and improve yield.
Labtech said that the release of new products has further enriched the company's product line of analytical testing instruments, broadened the application fields of the company's products, and will help consolidate and enhance the company's core competitiveness. At present, the new product has received orders and realized delivery.

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ICP-QQQ is one of the most expensive instruments for precursor trace analysis. This is huge.

FairAndUnbiased said:

ICP-QQQ is one of the most expensive instruments for precursor trace analysis. This is huge.

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Scale of 1 to 10? 10 being full-fledged, ready-to-roll EUV.

ZeEa5KPul said:

Scale of 1 to 10? 10 being full-fledged, ready-to-roll EUV.

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Uh, this doesn't really have anything to do with EUV or tangentially at best. Not to take away anything from this achievement. This is for debugging a chip and making sure it works. You can build the best chips in the world but if you can't do QA all those chips are less than worthless. What this gives China is a completely domestic way to do quality assurance, possibly better than what other countries can do. So yeah, it's immensely important. Potentially even monopoly producing important as if it's truly better everyone has to do their QA with Chinese equipment even Intel. But, it doesn't solve any EUV issues.

staplez said:

Uh, this doesn't really have anything to do with EUV or tangentially at best. Not to take away anything from this achievement. This is for debugging a chip and making sure it works. You can build the best chips in the world but if you can't do QA all those chips are less than worthless. What this gives China is a completely domestic way to do quality assurance, possibly better than what other countries can do. So yeah, it's immensely important. Potentially even monopoly producing important as if it's truly better everyone has to do their QA with Chinese equipment even Intel. But, it doesn't solve any EUV issues.

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One of the bigger points of value is that having more powerful test equipment like this can help you improve your production process immensely, let’s you see problems in your production flow before you’ve committed to scale, helps you develop production processes with tighter tolerances, etc.

staplez said:

Uh, this doesn't really have anything to do with EUV or tangentially at best.

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Don't be patronizing, of course I know testing and lithography equipment aren't directly comparable. A production ready EUVL machine is the most significant thing everyone in this thread anticipates. I'm asking @FairAndUnbiased to rank this 3Q machine's significance relative to that since he seems excited by this news.

To put it briefly, I'm asking him where this goes on the hype scale.

ZeEa5KPul said:

Don't be patronizing, of course I know testing and lithography equipment aren't directly comparable. A production ready EUVL machine is the most significant thing everyone in this thread anticipates. I'm asking @FairAndUnbiased to rank this 3Q machine's significance relative to that since he seems excited by this news.

To put it briefly, I'm asking him where this goes on the hype scale.

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Sorry, I wasn't trying to be patronizing. But it's really hard to put this in the "hype" scale. Like I said, it can range from this brings China's domestic capabilities to be purely in house to the whole world will need to use this because it's the best. It's also important to note that a triple quadrupole mass spectrometer does a lot more than scan chips. It's immensely important in pretty much every chemical industry known to man. So if it really is better then China will be getting a lot of orders. Potentially this is on the level of China having its own EUV monopoly in spectrometers.

ZeEa5KPul said:

Scale of 1 to 10? 10 being full-fledged, ready-to-roll EUV.

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Deposition and etching are chemical process and you want to have really good control of reactions and when you want to deposit a few nanometers or etch a high aspect ratio trench like in the case of 3DNAND having really good measure of the gases involved in the reaction will lead to better shrinking process and more yield. So yeah is important.

Is an important technique in EUV lithography in the cleaning process because you have to remove even trace amount of contaminants.

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