Li Xinghui's team from Shenzhen International Graduate School of Tsinghua University made new progress in the field of ultra-precision grating interferometry
Recently, Li Xinghui's team from the Shenzhen International Graduate School of Tsinghua University and the National University of Defense Technology team jointly proposed a heterodyne three-free grating interferometer based on a reflective two-dimensional grating. The team independently designed a dual-frequency laser system with high photosensitivity, high frequency difference and high signal-to-noise ratio. Based on a two-dimensional reflective grating and an innovative common optical path design, a three-degree-of-freedom displacement measurement system was built, and the heterodyne signal was designed and optimized. The phase detection algorithm finally achieves sub-nanometer measurement resolution and repeated positioning accuracy. This work will effectively promote the development of multi-degree-of-freedom grating precision positioning technology.
Multi-degree-of-freedom precision positioning technology plays an important role in nanometering, microscopic imaging, precision machine tools, semiconductor manufacturing and other fields. Taking semiconductor manufacturing as an example, the lithography machine is the "Pearl in the Palm" of the semiconductor industry. In the advanced process lithography machine, the wafer stage requires six degrees of freedom ultra-precise positioning technology with sub-nanometer displacement measurement accuracy. At present, laser interferometers and grating interferometers are commonly used in lithography machines to perform multi-degree-of-freedom ultra-precise positioning of the wafer stage. Environmental noise and Abbe error, and the grating interferometer based on the grating pitch is becoming the mainstream method for ultra-precision positioning of the wafer stage of the lithography machine.
(a) The six-degree-of-freedom measurement system of "four reading heads-four gratings" in the wafer table of the lithography machine; (b) the basic principle of the heterodyne three-degree-of-freedom grating interferometer
In response to the ultra-precise positioning requirements in advanced equipment such as lithography machines, the team proposed a new type of three-degree-of-freedom grating interferometer based on the principle of heterodyne interference, which can achieve sub-nanometer measurement resolution and repeatable measurement accuracy. The four-reading head-four grating" wafer stage measurement system can realize six-degree-of-freedom displacement/angular displacement measurement. The heterodyne grating interferometer uses a beam of dual-frequency laser to generate heterodyne interference through four beams of diffracted light from a two-dimensional reflective grating, and realizes the displacement measurement of the grating in the X/Y direction. The light produces heterodyne interference to realize the displacement measurement of the grating in the Z direction, thereby completing the three-free displacement measurement of the grating ΔX, ΔY, and ΔZ. This solution innovatively uses a two-dimensional reflective grating, which is conducive to the integration and miniaturization of the reading head of the optical path system. In future applications, the reading head and the grating can be installed on the fixed part and the moving part respectively to detect the movement of the moving part. Displacement, which has wider applicability than measurement methods based on transmission gratings.
In addition, the research team proposed and adopted a self-designed dual-frequency laser system, which has a larger and more stable frequency difference and stronger laser power than traditional commercial dual-frequency lasers based on the Zeeman effect, enabling more High light source stability, signal-to-noise ratio and larger heterodyne frequency are beneficial to improve the overall accuracy and measurement speed of the system. The final experimental results show that the system has a resolution of 0.5 nm, a repeat positioning accuracy of 0.6 nm and a measurement linearity of 2.5×10 -5 . The heterodyne three-degree-of-freedom grating interferometry method proposed in this study is conducive to the development of multi-degree-of-freedom ultra-precise positioning technology, and at the same time has guiding significance for the development of advanced equipment and precision instruments, especially for nanoscience that requires multi-axis ultra-precise positioning And technology.
(a) Self-designed dual-frequency laser system; (b) Heterodyne three-degree-of-freedom grating interferometer measurement system
(a) Three-axis resolution test results; (b) Three-axis repeat positioning accuracy test results at 10 nm and 40 nm
The relevant results were published online in the instrumentation field journal "IEEE Instrument and Measurement Transactions" (IEEE Transactions on Instrumentation & Measurement).
The first author of the paper is Zhu Junhao, a 2020 graduate student at the Shenzhen International Graduate School of Tsinghua University, Associate Professor Li Xinghui of the Shenzhen International Graduate School of Tsinghua University is the corresponding author, and the National University of Defense Technology is the co-corresponding author unit. The research work has been supported by projects such as Guangdong Basic and Applied Basic Research Fund, National Natural Science Foundation of China, Tsinghua University Research Startup Fund, Hunan Provincial Natural Science Foundation, and China Postdoctoral Science Foundation.