Naura:
Physical Vapor deposition, atomic layer deposition and sputtering
Chemical Vapor deposition, low pressure, atmospheric pressure, epitaxy growth and plasma enhanced
AMEC:
Metal organic chemical vapor deposition
Sypiotech:
Sub atmospheric pressure, plasma enhanced and atomic layer depoistion
Alphasemi:
Epitaxial deposition for NAND
Leadmicro:
Atomic Layer deposition
CETC:
Chemical, Physical, plasma enhanced, electrochemical deposition, sputtering.
ACM Research:
plasma enhanced and electrochemical deposition
Wanye enterprise Jiaxin
There are others who have pretty nice research equipment. this is one.