EUV technology testing platform from 2017, kinda like the concept. Looks suitable to test SSMB as a light source.
View attachment 97418View attachment 97419
General Research Laboratory of Microelectronics Equipment of the Institute of Optoelectronics has made breakthroughs in key unit technologies such as vacuum, film transport, workpiece table, vibration reduction and focus detection: the vacuum system achieves a stable high vacuum environment of 5.8 × 10 -7 Torr , ensuring that The stability of EUV light source propagation is improved; the frame and vibration reduction system of the whole machine meet the VC-F vibration reduction standard, and the vibration isolation effect is good in the frequency range of 2.2Hz - 500Hz in the horizontal direction and 2Hz- 500Hz in the vertical direction . The frame, workpiece table and mask table The stability meets the requirements of 32nm lithography and sub-nanometer wave aberration detection; the leveling and focusing detection system achieves nanometer-level detection accuracy, which provides a guarantee for the continuous multiple repetition of 32nm lithography resolution. At the same time, in the development of the workpiece table, the collaborative control technology of multiple workpiece tables is studied on the basis of the existing ones, which solves the problems of simultaneous control and position switching of the wafer table and the image table, the mask table and the object table; the automatic film feeding system Realize automatic loading and unloading in a vacuum environment ; the software system completes multi-module complex control, and coordinates each sub-system to complete the exposure process.
On the basis of completing the development of the key unit system, it has played a great role in cooperating with the overall project unit Changchun Institute of Optics and Mechanics to achieve 32nm repeatable exposure and with Shanghai Institute of Optics and Mechanics to achieve sub-nanometer wave aberration detection, which has been greatly affected by the overall project unit and each subject unit. And the acceptance group experts praised. During the research and development of the subject, the research group has achieved a series of original achievements in the fields of workpiece table control and precision measurement technology, and has applied for 31 invention patents , including 28 domestic patents and 3 international patents .