Dongfang Jingyuan Electron Limited has added three new products to their list.
- Defect Review SEM
SEpA-r600 is the first generation DR-SEM product of Dongfang Jingyuan. At present, the engineering machine (Alpha machine) has passed the first round of wafer demo, and the image quality has reached the level of the 6th generation of international mainstream equipment, realizing "clear sight"; the high-precision workpiece table is perfectly matched with the self-developed coordinate transformation algorithm, which can combine high-end The defect position reported by the optical inspection equipment is calibrated within the error range of ±1μm, reaching the international advanced level in the "accurate" index; the Search Mode and Direct Mode processes have been opened up, and "automation" has been realized in defect re-inspection. The product development team has both electron beam inspection/re-inspection experience and high-end optical inspection equipment application experience. The compound knowledge system enables the team to have a deeper understanding of DR-SEM, and the products developed will be closer to customer needs. At present, the SEpA-r600 product can meet the requirements of >=28nm process, and the Beta machine integration work is accelerating, and the customer order has been received, and it is just around the corner to enter the production line for verification.
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- Lithography Simulation Software
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- Yield Management Software.
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