There is a lot research being done in China but I think some of those researchers will be better off helping to solve the country most urgent needs. In this case is semiconductors manufacturing, given the urgency of the situation China should put even more human and monetary resources in the fast tracking of semiconductor material, parts, tool and so on. Some of the current research could just wait a bit more. Don't get me wrong, the Chinese had archive a lot in a short time but give the urgency of the situation more is needed.
They should create three institutes outside CAS were companies and researcher institutes cooperate fast tracking towards this goal.
1- Institute for Electronics Automation and Design: When companies and researchers work on the fast track developing, EDA, TCAD, yield management software, ecosystems, design tools and so, for the semiconductor industry.
2-Institute of Nanopatterning : Lithography, Lithography, Lithography. Companies and researches working in the fast track development of lithography tools, parts, light sources, software, materials, maskless lithography, NIL, EUV, immersion, stripping, coating, developing, photoresist, XRay, EBeam Lithography, metrology, masks, AI computational lithography and so on.
3-Institute of process equipment and materials: Fast track development of semiconductor process tools, materials and parts, Ion Implantation, deposition, etching, wet processing, dry processing, heat processing, planarization, cleaning, electric machinery for plasma tools, vacuum parts, spectrometry, robots, parts for equipment, ultra clean plastics, ceramics parts, gasses, quartz and so on.
The 上海集成电路装备材料产业创新中心有限公司 and the 上海集成电路研发中心有限公司 are a great start but given the urgency of the situation more should be done.