@foofy Sir is this related to your previous post regarding ICRD?
Havok:
SMEE 60nm dry double-stage lithography machine was verified at ICRD. Domestic large silicon wafers, photoresist, etc. are also there to verify with the lithography machine.
ICRD has replaced imported equipment on the 16nm and below process verification line with the exception of immersion lithography machines with domestic equipment. This line has a production capacity of about 5,000 wafers/year and is currently being test and verification.
第3页,东方晶源电子束晶圆检测装备研发生产基地项目正式签约落地-IT与通讯技术-≡ 超级百科与探索区≡-。创于2002年的超级大本营军事论坛,提供国防教育、爱国主义科普、军事装备、战争历史、时事热点、战略评论等全方位专业军事讨论平台。
lt.cjdby.net
上微新干式双工件台光刻机在ICRD验证。国产大硅片、光刻胶等也一起在那里配合光刻机验证。ICRD已经把16nm及以下工艺验证线上除浸没光刻机外的其他一些进口设备全换成了国产设备,这条线产能约5000片/年,目前正在调试。
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