
The first time I read about a ban on semiconductor manufacturing tools was in 2017 by one of the CEOs of google, Eric Schmidt, he was advocating for a full ban in Immersion lithography. At the time the focus was more about banning Huawei access to US tech because most stooges where under the impression that China was not really capable in chip manufacturing and the none of China fabs would be capable of making the kind of chips that US companies make.A blanket ban om semi equipment would have huge disruption in 2021 that us and the world were not going to be able to deal with
Domestically produced SSA800 lithography machine achieves mass delivery
According to reports, Shanghai Microelectronics Equipment (Group) Co., Ltd. (SMEE) has recently completed the first batch delivery of its independently developed SSA800 series 28nm immersion DUV lithography machine, which has entered the mass production process verification stage.
The machine passed the acceptance test by the expert group of the Ministry of Industry and Information Technology in July 2025, completing the full-process technical verification. In January 2026, Shanghai Microelectronics officially announced for the first time at the Yangtze River Delta Semiconductor Industry Summit that the SSA800 series had achieved full-scale mass production, with a production yield consistently above 90%. In March 2026, Shanghai Microelectronics publicly showcased the machine for the first time at SEMICON China 2026. The completion of the first batch delivery of the SSA800 series lithography machine marks a crucial leap for domestically produced 28nm immersion lithography machines, from "usable" to "easy to use and mass-producible."
The SSA800 series reportedly employs 193nm ArF immersion lithography technology, natively supporting 28nm processes in a single exposure, and can stably achieve 14nm and even more advanced process production through multiple exposure processes. The equipment's overlay accuracy is controlled within ±2.3~2.5nm, with a stable mass production yield of 90%~95%, and it can process 150 wafers per hour. Regarding supply chain self-sufficiency, the SSA800 boasts a domestic production rate exceeding 85%, with all three core subsystems being domestically developed and manufactured.
Regarding mass production planning, the SSA800 series is expected to complete the delivery of 5-8 units in the second quarter, achieving stable mass production and delivery throughout the year. Industry experts predict that as production capacity continues to ramp up, the SSA800 series lithography machines will quickly cover the expansion needs of most mature process wafer fabs in China, and the market share of mature process lithography machines in China will rapidly shift towards domestically produced equipment.
Currently, the core chips used in everyday products such as automobiles, home appliances, industrial equipment, and communication terminals all rely on mature process production capacity. The mass delivery of SSA800 will fill the gap in core equipment for domestic mature process chip manufacturing. More importantly, it can drive technological iteration in light sources, optical lenses, dual workpiece stages, precision motion control, immersion systems, detection systems, and component manufacturers, opening up the entire process system of high-end lithography machine R&D, manufacturing, mass production, and commercialization. This will accumulate core technologies, supply chain support, and mass production experience for the development of more advanced process lithography machines in the future.
Finally.
Domestically produced SSA800 lithography machine achieves mass delivery
According to reports, Shanghai Microelectronics Equipment (Group) Co., Ltd. (SMEE) has recently completed the first batch delivery of its independently developed SSA800 series 28nm immersion DUV lithography machine, which has entered the mass production process verification stage.
The machine passed the acceptance test by the expert group of the Ministry of Industry and Information Technology in July 2025, completing the full-process technical verification. In January 2026, Shanghai Microelectronics officially announced for the first time at the Yangtze River Delta Semiconductor Industry Summit that the SSA800 series had achieved full-scale mass production, with a production yield consistently above 90%. In March 2026, Shanghai Microelectronics publicly showcased the machine for the first time at SEMICON China 2026. The completion of the first batch delivery of the SSA800 series lithography machine marks a crucial leap for domestically produced 28nm immersion lithography machines, from "usable" to "easy to use and mass-producible."
The SSA800 series reportedly employs 193nm ArF immersion lithography technology, natively supporting 28nm processes in a single exposure, and can stably achieve 14nm and even more advanced process production through multiple exposure processes. The equipment's overlay accuracy is controlled within ±2.3~2.5nm, with a stable mass production yield of 90%~95%, and it can process 150 wafers per hour. Regarding supply chain self-sufficiency, the SSA800 boasts a domestic production rate exceeding 85%, with all three core subsystems being domestically developed and manufactured.
Regarding mass production planning, the SSA800 series is expected to complete the delivery of 5-8 units in the second quarter, achieving stable mass production and delivery throughout the year. Industry experts predict that as production capacity continues to ramp up, the SSA800 series lithography machines will quickly cover the expansion needs of most mature process wafer fabs in China, and the market share of mature process lithography machines in China will rapidly shift towards domestically produced equipment.
Currently, the core chips used in everyday products such as automobiles, home appliances, industrial equipment, and communication terminals all rely on mature process production capacity. The mass delivery of SSA800 will fill the gap in core equipment for domestic mature process chip manufacturing. More importantly, it can drive technological iteration in light sources, optical lenses, dual workpiece stages, precision motion control, immersion systems, detection systems, and component manufacturers, opening up the entire process system of high-end lithography machine R&D, manufacturing, mass production, and commercialization. This will accumulate core technologies, supply chain support, and mass production experience for the development of more advanced process lithography machines in the future.
Domestically produced SSA800 lithography machine achieves mass delivery
According to reports, Shanghai Microelectronics Equipment (Group) Co., Ltd. (SMEE) has recently completed the first batch delivery of its independently developed SSA800 series 28nm immersion DUV lithography machine, which has entered the mass production process verification stage.
The machine passed the acceptance test by the expert group of the Ministry of Industry and Information Technology in July 2025, completing the full-process technical verification. In January 2026, Shanghai Microelectronics officially announced for the first time at the Yangtze River Delta Semiconductor Industry Summit that the SSA800 series had achieved full-scale mass production, with a production yield consistently above 90%. In March 2026, Shanghai Microelectronics publicly showcased the machine for the first time at SEMICON China 2026. The completion of the first batch delivery of the SSA800 series lithography machine marks a crucial leap for domestically produced 28nm immersion lithography machines, from "usable" to "easy to use and mass-producible."
The SSA800 series reportedly employs 193nm ArF immersion lithography technology, natively supporting 28nm processes in a single exposure, and can stably achieve 14nm and even more advanced process production through multiple exposure processes. The equipment's overlay accuracy is controlled within ±2.3~2.5nm, with a stable mass production yield of 90%~95%, and it can process 150 wafers per hour. Regarding supply chain self-sufficiency, the SSA800 boasts a domestic production rate exceeding 85%, with all three core subsystems being domestically developed and manufactured.
Regarding mass production planning, the SSA800 series is expected to complete the delivery of 5-8 units in the second quarter, achieving stable mass production and delivery throughout the year. Industry experts predict that as production capacity continues to ramp up, the SSA800 series lithography machines will quickly cover the expansion needs of most mature process wafer fabs in China, and the market share of mature process lithography machines in China will rapidly shift towards domestically produced equipment.
Currently, the core chips used in everyday products such as automobiles, home appliances, industrial equipment, and communication terminals all rely on mature process production capacity. The mass delivery of SSA800 will fill the gap in core equipment for domestic mature process chip manufacturing. More importantly, it can drive technological iteration in light sources, optical lenses, dual workpiece stages, precision motion control, immersion systems, detection systems, and component manufacturers, opening up the entire process system of high-end lithography machine R&D, manufacturing, mass production, and commercialization. This will accumulate core technologies, supply chain support, and mass production experience for the development of more advanced process lithography machines in the future.
this has been posted on this thread.This may well be the most important news of the last 2 years.
Because of this I am wondering about the sources: "According to reports" what it means according to reports?
They say "In March 2026, Shanghai Microelectronics publicly showcased the machine for the first time at SEMICON China 2026" but this is not what has been reported in this forum in March, actually the stand of SMEE was showing a mock-up that they present every year and I don't remember of any official announcement at the time: SEMICON China 2026 was covered at length here.
Also overlay tolerance ±2.3~2.5nm is the single most important parameter for a litho machine. It would be important to have an official spec by SMEE in this regards. The article seems to hint that the SSA800 machine is now publicly acknowledged and officially reported by SMEE: so why specs arrive through "reports" ?
Again, I am questioning not to minimize the news, but actually for the opposite reason, because the news if official (currently it is not IMHO) would be the single most important of the last few years: there is a big difference between knowing that the SSA800 exists and it works and its official presentation with official specs by SMEE.

