Shandong Liguan Microelectronics Equipment: Accelerating the development of 12-inch liquid phase SiC crystal growth equipment
Recently, Shandong Liguan has made significant achievements in the research and development of 12-inch silicon carbide (SiC) crystal growth furnaces. According to the company, it has successfully overcome the technical difficulties of the 12-inch physical vapor transport (PVT) resistance heating crystal growth furnace and successfully completed the delivery of the first two units of the equipment. At the same time, Shandong Liguan is stepping up research and development of 12-inch liquid phase SiC crystal growth equipment. With the key breakthrough in the commercialization of the 12-inch resistance crystal growth system, Shandong Liguan has formulated corresponding plans and is expected to achieve mass supply of 12-inch crystal growth equipment in 2025, and is committed to promoting domestic silicon carbide materials to occupy a leading position in the global supply chain and enter the first echelon.
Shandong Liguan has successfully developed an 8-inch PVT silicon carbide crystal growth furnace and has achieved mass sales. The crystal growth furnace integrates induction and resistance heating functions and is suitable for the growth of conductive and semi-insulating SiC crystals. Its innovative thermal field design improves temperature uniformity and stability by more than 30%, thereby significantly improving the yield and consistency of crystals to international mainstream standards. At the same time, the equipment is equipped with an automated control system that effectively reduces manual intervention and production costs, and has been selected by leading domestic and foreign customers.
According to public information, Shandong Liguan's product line covers a wide range of semiconductor material process equipment from the first to the fourth generation, and all of them have independent intellectual property rights, achieving complete independent control. These devices are widely used in the manufacturing of new electronic devices such as integrated circuits, power semiconductors, compound semiconductors, 5G chips, optical communications, and MEMS.