It was learned from Binhua Group that through technological breakthroughs in four areas—process, engineering, testing, and filling—the quality of its high-purity hydrogen fluoride products for semiconductors has reached the 6N grade (99.9999%), placing it at a leading level domestically and a world-class level internationally. This marks a breakthrough in my country's long-standing foreign monopoly in the field of key semiconductor materials, filling the gap in domestic high-purity hydrogen fluoride production capacity.
High-purity hydrogen fluoride gas acts like a precision "carving knife," serving as a core electronic specialty gas for critical processes in semiconductor wafer manufacturing, such as dry etching and cavity cleaning. Its purity directly determines wafer yield. 6N-grade high-purity hydrogen fluoride is essential for advanced processes at 28 nanometers and below. Previously, my country relied heavily on imports of 6N-grade high-purity hydrogen fluoride, with foreign companies monopolizing approximately 80% of the global market share.
Semiconductor-grade hydrogen fluoride requires a purity of 99.999% (5N) or higher. "The transition from 5N to 6N is not just about adding another purification step, but about establishing a completely new purification system," explained Liu Teng, General Manager of the Specialty Chemicals Division of Binhua Group. Achieving 6N purity hinges on overcoming miscible impurities in hydrogen fluoride, such as trace amounts of water, carbon dioxide, and oxygen-containing organic matter. A multi-stage distillation coupling system was designed in the rectification section. By optimizing the internal components and operating window, deep removal of carbon and oxygen impurities was achieved under a specific pressure gradient, fundamentally controlling key impurities like carbon and oxygen.
Simultaneously, the company independently developed a closed, precise sampling system and a highly sensitive analytical approach, minimizing background environmental interference during sampling to ensure that analytical data accurately reflects product quality and guaranteeing the stability and reliability of the 6N index.
Currently, the market price for 6N grade high-purity hydrogen fluoride is over 2 million yuan per ton. Binhua Group has completed the construction and commissioning of a 50-ton/year high-purity hydrogen fluoride cylinder filling line and obtained a cylinder filling license issued by the Shandong Special Equipment Inspection Institute. It has begun promoting its products to key domestic and international clients.
An evaluation meeting for the project "Key Technologies and Applications of Ultra-High Purity Electronic-Grade Hydrofluoric Acid for Advanced Semiconductor Processes," organized by the Chemical Industry and Engineering Society of China, was also held at Binhua Group. The expert panel unanimously agreed that the project's key technologies and product indicators have reached the international advanced level.
The ultra-high purity electronic-grade hydrofluoric acid project is a key R&D project (major scientific and technological innovation project) of Shandong Province, jointly completed by Binhua Group and Tianjin University. The project team successfully overcame technical bottlenecks in hydrofluoric acid purification, efficient adsorption, and key equipment for cleaning and filling, achieving continuous, large-scale, and stable production. Product indicators surpass SEMI-G5 grade, and it has been successfully adopted by 14nm advanced process semiconductor end customers, with its quality and stability recognized by leading companies in the industry.