D
Deleted member 15949
Guest
RS226, I presume, would be the ArF immersed laser?China has a 150watts EUV prototype.
For DUV
6kHz 60W ArF is RS266
4kHz 40W KrF is RS244S
4kHz 40W ArF is RS244
4kHz 20W ArF is RS222
In addition, U precision dry double-workpiece stage has begun mass production at the end of last year. The annual output of dry-type and immersed double-workpiece stages is about 12. Its laser annealing and other equipment have been supplied to manufacturers such as BYD in batches.