EUV Labs and the Institute of Spectroscopy from the Russian Federation provided more details about its
The technology, called TEUS, is a high-brightness EUV laser produced plasma (LPP) light source based on a fast rotating target. The TEUS-S100 and S400 models employ 100W and 400W of average laser power, respectively. At a separate event, EUV Labs and the Institute of Spectroscopy recently
about the technology.
“Like any other LPP light source, it uses a laser, which is a solid-state neodymium laser, and target delivery system,” said Mikhail Krivokorytov from EUV Labs in a presentation at SPIE Photomask/EUV. “We use tin as the plasma fuel and under appropriate focus and conditions of the laser, it provides relatively high conversion efficiency.”
What’s different about the technology? The target is based on a liquid metal, which located in a fast rotating crucible. “A fast rotating target has several advantages but the main ones are excellent inherent spatial stability of the source and the fact that fast rotation provides a redirection of droplets away from the optical elements, keeping them clean,” Krivokorytov said during the presentation.
The source power units provide 100 watts, 200 watts, and 400 watts of laser power. “The low power modification, which is TEUS-S100, provides 8.5 milliwatts of in-band EUV irradiation. And the most powerful modification, TEUS-M400, provides more than 100 milliwatts of in-band EUV irradiation,” Krivokorytov said. “The plasma size is 60 microns. And it is the same for all modifications. So EUV source brightness varies from 60 watts per millimeter square per steradian for a 100 watt drive laser up to 240 watts per millimeter squared per steradian for a 400 watt drive laser.”